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Mini Plasma Sputtering Coater with Vacuum Pump & Gold Target, 1.5" Max Sample -GSL-1100X-SPC12

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Item Number: GSL-1100X-SPC12

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GSL-1100X-SPC12 is a compact plasma sputtering coater designed for making metallic coatings, such as gold, platinum, Indium and silver etc which can be applied on a sample up to 40 mm diameter with 300 Angstrom thickness. Especially for coating conductive gold film for SEM sample. The plasma sputtering coater is shipped with all necessary accessories for immediate use, including one sputtering head with gold sputtering target (gold cathode), Vacuum pump, stainless steel bellows, quick clamps and vapor trap.

SPECIFICATIONS


Input Power
Specimen chamber
  • Fused glass tube, 100 mm Dia. x 130mm Height 
  • Stainless steel flange
Specimen stage
  • 40 Dia. (Can coating 6 SEM sample on one stage)
  • Height of the stage is adjustable





Vacuum Accessories




Every acessories are included for immediate use. ( (Please click the picture left for detail )

  • 120 L/m  Rotary Vane Vacuum Pump (external) with Pirani gauge vapor trap prevent oil streaming get back into the vacuum chamber
  • Stainless steel bellows with KF16 adapter and quick clamps
  • Two Stage Exhaust Filter on vacuum pump to eliminate oil vapor contamination
  • One sphere vapor trap is included to avoid pump oil return to vacuum chamber
  • High purity gold foil target
                  

Gas atmosphere

One needle valve installed to allow Ar gas flow to achieve better plasma coating.








Targets



                  
  • Note: All metallic materials may be coated. If you need any metal target, please email us.



    Overall dimensions

    L480mm x W320mm x H150mm
     (click to enlarge the picture)

    Shipping weight

    160 Lbs with crating

    Net Weight

    20 kg







    Application Notes       

    • MTI Corp. shares the most state-of-art sputter coating technology with our customer, please click the picture below to read the artical Plasma Sputter Coating.
    • For the best film strength, please use plasma cleaner to clean sample surface before coating
    • For coating Al. Zinc and graphite light weight metallic material,   the sputtering coating is not efficient due to low energy,   please consider to use thermal evaporating ocater
    • Conductive gold film on the sample after 10s processing
    • The system requires an Ar gas tank with pressure regulator which is not included
                
    Operation Instructions

                 

    Warranty

    One year limited warranty with lifetime support
    Certificate   certified

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    Notices
    1. Prices listed online are valid for US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
    2. We may add extra charges for paper order and net30 terms due to extra labor cost.
    3. The prices listed are subject to change without notice.