Gallium nitride substrates are matched in lattice constant and thermal expansion properties for epitaxial growth of doped GaN layers needed for fabrication of GaN-based devices. This eliminates stress and defects induced by growing GaN epi-layers on non-nitride substrates such as sapphire or silicon carbide, which increase device fabrication complexity and cost and compromise device performance. MTI currently offers GaN substrates to fill the needs of many applications.
Standard Cleaning of As-grown AlN and GaN Templates
Chemicals used: acetone and lPA
Procedure:
- Tum hotplate to 150'C for both Acetone and lPA (in separate beakers)
- Wait for boil
- Place the sample in boiling Acetone for 10 minutes
- Remove sample from Acetone and place in heated IPA and ultrasonic for 5 minutes
- Dry sample completely using an N2 air gun