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Customized 1100oC 4 Zone Tube Furnace with 24" ( 600 mm) D°a Quartz tube and Flange - GSL-1100X-24-IV

Customized 1100oC 4 Zone Tube Furnace with 24" ( 600 mm) D°a Quartz tube and Flange - GSL-1100X-24-IV

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GSL-1100X-24-IV is a four-zone tube furnace with 24" quartz tube and vacuum flanges. Needle valves and, vacuum gauges are pre-installed for immediate use.  30-segment programmable controllers are built-in with K type thermal couple. Microprocessor-based PID control provides excellent control without overshooting and +/- 1 ºC accuracy. It has been widely used for materials or chemical lab for sintering all types of new material samples under vacuum or other gas conditions. It is an excellent tool for annealing, CVD, and sintering processes.

SPECIFICATIONS

Furnace structure
  • Double-layer steel casing with air cooling.  The surface temperature of the case is < 70°C.
  • Refractory fibrous alumina insulation liner for maximum energy saving.
  • Heating element: NiCrAl Resistance Wire
  • Two fibrous ceramic tube blocks are included for blocking heat radiation from the inside tube.   (Ceramic blocks must be fully inserted into the furnace chamber before heating) 
  • Hinged types of vacuum-sealed flanges  are included to achieve a vacuum level of 10-5 torr by a turbo-pump
  •       Holding 8" wafer 

Heating zone
  • Total heating zone length 1200 mm
  • Four zones: 300 mm + 300 mm + 300mm + 300 mm (24" per zone)
  • Constant temperature zone:
    • 1000 mm (if three zones are in the same temperature within +/- 3°C)  longitude direction
    • 1100 mm  (if three zones are in the same temperature within +/- 5°C) longitude direction
    • +/- 3 oC along the cross-section
Working temperature
  • Max heating temperature: 1150°C ( < 1 hour )
  • Normal working temperature: 200~1100°C 
  • Max heating & cooling rate: 5°C/min
  • Temperature uniformity: please click the pic left to enlarge
Temperature control
       
  • Four digital controllers with PID/self-tuning functions and 30 segments programmable.
  • Thermocouple: four K type thermocouples (one for each zone)
  • Control accuracy: +/- 1°C
  • Touch Screen control panel and PC operation software are available upon request
       
Processing Tube
  • High-quality quartz tube with OD 600 mm x ID 590 mm x L 1500 mm
Vacuum sealing & Flange

  • A pair of water cold SS vacuum sealing flange (Hinged Type) and 4 pieces of silicon O-ring are included.
  • Left Side Flange: Vacuum gauge, stainless steel needle valves, and 1/4" barbed hose fitting.
  • Right Side Flange: KF40 vacuum port with KF-40 Vacuum Right-Angle Valve for easy connection to KF40 bellows and pump. ( If using a pump with a KF25 port, you will need an adapter KF40-KF25.
  • One 1/4" OD thermal couple insert port is built in the flange for easy temperature calibration.
  • Vacuum Level: 10-2 torr by heavy-duty mechanical pump and 10-4 torr by regular turbopump.  5x10-6 torr can be reached by 700 L/s high-speed turbopumps and a modified flange adaptor
  • Arecirculatingwaterchiller 16L/minis included for cooling flanges
                 
Options for CVD

Click to enlarge

  • The tube furnace should be calibrated regularly to maintain temperature accuracy and uniformity. We are providing a simple calibration kit for you to complete this job at an extra cost The complete calibration kit includes (click the underline to see details):
  • You may consider ordering a turbopump for hi-vacuum up to 10-5 torr ( click pic 1 to order )    
  • For CVD application, you may need a gas delivery system as Pic. 2
  • For flammable gases, especially H2,  you may integrate a gas leak detecter into the control panel, as Pic.3

 

Pic. 1Pic. 2    Pc. 3

 
Rated Voltage
  • Three Phase, 220V AC, 50/60 Hz
  • Power consumption:  ~50  KW
Compliance
  • CE Certified
  • NRTL or  CSA Certification is available upon request, additional charges will apply

NOTE
Warning
  • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure <  0.2 bar / 3 psi
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn about the installation of a gas regulator.
  • Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gases should be limited to<200 SCCM for reducing thermal shocks to the tube

 

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Product Dimension:

  • ~ 2000 L x 900W x 1200 H mm 

Net Weigh:

  • 400kg

Shipping:

  • Shipping Dimension: 80" x 40" x 70"
  • Shipping Weight: 1000 lbs


MTI offers a One-Year limited warranty with lifetime support(may cause a fee) for this product.

The MTI One Year Limited Warranty does NOT cover

  • Consumable parts such as Graphite dies, O-rings, crucibles, screws, washers, etc.
  • Any damage and rust resulting from improper storage or maintenance.
  • Any damages caused by the use of corrosive and acidic gases.
  • Any damage resulting from failing to adhere to the individual product's specific operation requirements, such as water cooling, venting, etc.
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