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Three Zones CVD Tube Furnace with 8.5" Quartz Tube & Slidable Flange (1100C) - GSL-1100X-8.5-III-SR

Three Zones CVD Tube Furnace with 8.5" Quartz Tube & Slidable Flange (1100C) - GSL-1100X-8.5-III-SR

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GSL-1100X-8.5-SR-III is a three heating zone 8.5" O.D quartz tube furnace with slidable vacuum flange and multi-gas fed through SS tube for LPCVD processing, It is widely used for depositing a various film on wafers up to 6" under multi-gas condition. The tubing furnace's max working temperature is 1100°C, which is controlled by a precision controller with accuracy +/-1°C and 30 segments programmable.
SPECIFICATIONS
Furnace structure
  • Double-wall steel casing with forced air cooling.
  • Two cooling fans inside to keep the temperature of outside case < 70 ºC
  • High purity alumina fibrous insulation for max energy saving
  • One sliding rail to support flange to load sample with ease
  • Three heating zone to achieve a longer constant temperature zone or a certain temperature gradient
Input voltage 220VAC Single phase
power 8kW
Fused quartz tube size
  • 8.5" O.D x 8.2" I.D x 51" Length
  • One quartz tube is included, and the spare tube is available as an option ( click picture below to order )

Heating element NiCrAl Resistance Wire
Working Temperature
  • Max. heating temperature: 1100°C
  • Continuous working temperature: 400 -1000°C
  • Max. heating/cooling rate: 10°C/min
Heating zone
  • Total heating zone length 900 mm (36")
  • Three zones: 300 mm + 300 mm + 300mm (12" per zone)
  • Constant temperature zone: 500 mm (if three zones are in the same temperature)
Temperature controller
  • Three precision temperature controller with PID function and 30 segments programmable
  • One extra temperature monitor is built in to shut down power when temperature out of control by accident
  • Double K type thermal couple installed.
  • Temperature accuracy: +/-1°C
  • Software and PC interface module is available at extra cost
  • Eurotherm 3000 temp. controllers with +/- 0.1 oC accuracy are available upon request

   Optional: PC interface & software Eurotherm temp. controllers

Vacuum Flange and gas feedthrough ports
  • Vacuum sealed stainless steel flanges with double high-temperature silicone O-ring are included to achieve high vacuum (Usually 10-2 torr by mechanical pump and 10-4 torr by molecular pump ). The vacuum pump is not included
  • The right-side flange is hinge-type and KF25 vacuum port. KF25 Vacuum Right-Angle Valve and 1.2 meters long KF-40 Flexible Stainless Steel Vacuum Hose ( Bellows ), are included. One 1/4" diameter feedthrough port is built-in one flange for insert a thermal couple to calibrate furnace temperature. ( please order 36" length x 1/4"dia K type
    thermal couple to insert the feedthrough at the related product or click underlined )
  • The left-side flange is installed on the slidable table to make moving easy. There is five stainless steel feed though pipes and needle valve are installed on the flanges to feed multi-CVD gases.
  • One quartz block is included, which must put the right end of the tube to block heat radiation
  • The left-side flange is installed on the slidable table to make moving easy. There is five stainless steel feed though pipes and needle valve are installed on the flanges to feed multi-CVD gases.
  • 4 pcs quartz plate is built-in left side flange for the thermal block is built in left-side flange. Please use a recirculating water chiller for water cooling to save the environment ( click underlined to order )

Right side flange  Left side flange Sliding flange 

Compliance
  • CE Certified
  • NRTL or CSA certification is available upon request
Warning
  • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa
  • Attention: Due to the high-pressure gas output from the gas cylinder, it is necessary to install the gas pressure regulator with it to reduce the output pressure, avoid overpressurizing the furance chamber and ensure a safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube.

OPTIONAL ACCESSORY

Part No.
Description
Quick Link

Quartz tube block /heat insulating tube block (Compare with the conventional ceramic block, quartz thermal block with alumina fiber inside can help achieve a higher vacuum level and avoid potential contamination .)
KF-suite
MTS02 Computerized temperature Control System
CVM-211
Compact Digital Vacuum Gauge & Controller with Power Supply (Up to 10-4 Torr)

High vacuum station (Mechanical pump + turbo molecular pump.)

Gas mix station (Float flow meter / Mass flow meter) (2, 3, 4channels selectable)

Quartz Boats /crucible /container /sample holder
CW3000AG-110
Thermolysis Water-cooled Chiller with 9 Liters Tank, 10L / min Flow
FM-Cart-68
800 x 600mm Heavy Duty Mobile Car for Tube and Box Furnaces 

 

Product Dimension:

  • Furnace:  1300 L x 680 W x 920 H,  mm
  • Sliding Table: 600mm L
  • Note: You must put the furnace and sliding table on a flat surface.  Must make good alignment between the sliding flange and furnace ( We ship sliding table and furnace separately

Net Weight:

  • 354 Kg

Shipping:

  • Shipping Dimension: 70" x 70" x 65"
  • Shipping Weight: 354 Kg





MTI offers a One-Year limited warranty with lifetime support(may cause a fee) for this product.

The MTI One Year Limited Warranty does NOT cover

  • Consumable parts such as Graphite dies, O-rings, crucibles, screws, washers, etc.
  • Any damage and rust resulting from improper storage or maintenance.
  • Any damages caused by the use of corrosive and acidic gases.
  • Any damage resulting from failing to adhere to the individual product's specific operation requirements, such as water cooling, venting, etc.
Manufacturer Part Number: