• 208 - 240 VAC 50/60 Hz, single phase, 500 VA
• A power cable included without a plug
• 110VAC power is available with a transformer 750W 

• A tungsten coil filament 
• Alumina crucible for metallic materials. 
• B type thermocouple
  

• Manual current control
  • Working current < 40 A
  • Recommend current < 20 A
• PID programmable temperature control
  • 30 temperature segment 
  • Heating rate <0.3°C/s at T <1200°C; <0.15°C at 1200-1700°C
  • ±1°C control stability 
  • B type thermocouple

• Ø50 mm rotary sample stage with a mechanical shutter
• Rotary speed: 5 rpm
• Stroke length 40 - 85 mm (distance from sample holder to evaporation source)

• Quartz crystal microbalance, QCM is optional for measurement of deposition rate and film thickness.
• Resolution 0.10 Å
• Readout from PC software.
• Input coating material info based on the included database
• Display total coating thickness and coating speed
•   

• Quartz
• O.D.:165mm
• I.D.: 150mm
• Length: 250mm

Pressure Gauge

• Anti-Corrosive Capacitance Diaphragm Gauge for vacuum from 3E-5 Torr to 1013 torr

Vacuum

(Optional)

• The KF25 vacuum port is installed to connect to a vacuum pump
• Ultimate vacuum <4.0E-6 Torr by overnight pump with optional turbomolecular pump
• A vacuum pump is required but not included for for coating. 
  
  • Dual-stage Rotary Vane Pump ( 10-2 torr)
  • Turbopump ( 10-5 torr) with direct connection is highly recommend. 

• 1/4 tube fitting is built-in for chamber purge or vent
• One needle valve is built-in to control gas flowing rate

• A total of 4 evaporating sources crucibles could be used to deposit multiple different materials to grow multilayers one by one in the same chamber atmosphere.
• 

• CE Certificate
• NRTL or CSA certification is available upon request

• To achieve the high vacuum required for the evaporation of some materials, the user can
• Use lint-free wipes wetted with isopropyl alcohol (IPA) to clean all the surface in the vacuum chamber.
• Use heater tape to bake the chamber at 150 ºC and pre-heat the coil heater and crucible at 500 ºC while pumping with the optional turbopump for at least 2 hours
• Pump the chamber overnight without heating if a vacuum higher than 1.0E-5 Torr is needed
• The coater can be placed into an Ar or N2 gas glove box for thermal evaporation of humility & oxygen-sensitive materials, such as Li metal. Click the left picture for a demo in MTI's VGB-6OP glove box ( If you have other brand gloveboxes, you may need feedthrough of KF40 to connect a vacuum pump outside )
• DO NOT start the heating program or manually ramp up the current without an enclosed chamber and a vacuum!
• DO NOT release the vacuum or stop pumping when the coater is in evaporation operation! During the heater cool down, stop pumping or release the vacuum ONLY when the temperature is decreased below 100 ºC!

SPC2-ARSC