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2" High Vacuum Magnetron Sputter Source with Flexible Head & Quick Connector - HVMSS-SPC-2F

2" High Vacuum Magnetron Sputter Source with Flexible Head & Quick Connector - HVMSS-SPC-2F

Minimum Order: $20 (equipment), $100 (crystals)

Low stock: 1 left

Price: Replacement Part Not For Sale
$2,998.00 USD
Sale Email for Lead Time

SKU:  HVMSS2F

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The HVMSS-SPC-2 is a 2" diam. circular magnetron sputtering gun which can accommodate a wide range of sputtering targets, such as metallic/insulating or magnetic/non-magnetic. The circular rare-earth NdFeB permanent magnet is implemented to ensure excellent film uniformity and target utilization. Such a sputtering gun is easy to operate and maintain. Installation is straight forward and it can be operated with either DC or RF power supply.

SPECIFICATIONS:

Features
  • The sputtering head can be tilted +/- 25 degrees for adjusting the incidence angle of bombardments to improve the sputtering yield. 
  • Made of high-quality materials of stainless steel and ceramics. 
  • Electromagnetic finite element calculations are used in the design of the permanent magnetic assembly to achieve high field strength and uniform field profile. 
  • The magnet is coated with protective material against cooling water corrosion to maximize durability.
  • Standard RF connector, which matches with a wide range of DC and RF sputtering power supplies.
  • The low impedance sputtering heads are easily interfaceable with an external power supply.
  • Easy to install a standard fitting with included quick connector
  • 2" Copper Backing Plate (EQ-CBP-2) is included.
  • Target replacement is easy and no need to adjust the gun to fit targets with different height.
Power Requirement
  • DC (Max.) 500 W
  • RF (Max.) 300 W
Electrical Connection Type
  • Standard SL16 cable Connector ( Pic.1 )
  • Optional 148 cm RF cable with SL6 connector (click Pic. 2 to order)

  Pic.1 Pic.2
Sputtering Current (Max.)
  • 5 Amp
Sputtering Voltage
  • 200-1000 V
Sputtering Pressure
  • 1-1000 mTorr


Sputtering Uniformity Curve
Dimensions
  • Anode Shield Diameter: 86mm


Sputtering Target
  • Diameter: 2.0" (50.8mm), 
  • Thickness: up to 1/4" for non-magnetic target; up to 1/16" for magnetic target
  • Utilization: up to 30%
  • Magnet: NdFeB Rare Earth Magnet

Cooling Water Requirement
  • Flow Rate: 0.8 GPM, filtered
  • Water Inlet Temperature: <20 C
  • Water tubing: 6mm quick disconnect.
Mounting
  • Feedthrough: 3/4" O.D.tube
Net Weight
  • 3.5 lbs



Accessories
  • High vacuum Quick connector with 0.75" ID is included. Use this component to install the sputtering source onto the baseplate (up to 1” thick) of a vacuum chamber with 1” diameter through-hole at easy ( click pic below left to see detail )
  • 6" CF flange with a high vacuum feedthrough is available upon request at extra cost. The sputtering head can be easily installed on the 6'' CF vacuum flange through the quick disconnector. The height position of the sputtering gun can be manually adjusted inside the vacuum chamber. ( Pls click Pic below 3 &4 to see detail )
  • Digital Temperature Controlled circulating Water Chiller with 6 Liters Tank, 16L / min Flow is available at extra cost, please click the picture below right to order.
 
More Sputter Components
Click the picture above for more products.



STANDARD PACKAGE
Item No.
Description
Quantity
HVMSS-SPC-2
2" Magnetron Sputter Source
1
EQ-CBP-2
2" Copper Backing Plate
1
High Vacuum Feedthrough (Quick Connector)
1
Optional Part
Push-to-connect fitting
(Please inform us the tube size of your water chiller, we can prepare the fitting for you.)
Optional
High Conductive Silver Epoxy for Target Bonding
 Optional

 

 

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MTI offers a One-Year limited warranty for this product.

The MTI One Year Limited Warranty does NOT cover

  • Consumable parts such as Graphite dies, O-rings, crucibles, screws, washers, etc.
  • Any damage and rust resulting from improper storage or maintenance.
  • Any damages caused by the use of corrosive and acidic gases.
  • Any damage resulting from failing to adhere to the individual product's specific operation requirements, such as water cooling, venting, etc.
Manufacturer Part Number: