Dual Zone Quartz Tube Furnace (80mm Dia, 1200C Max) with 3-Ch Gas Mixe

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Dual Zone Quartz Tube Furnace (80mm Dia, 1200C Max) with 3-Ch Gas Mixer, Vacuum Pump, & Anti-Corrosive Vacuum Gauge - OTF-1200X-II-F3LV

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OTF-1200X-II-F3LV is a CE-certified and ready-to-pass UL/CSA certification Dual Zone Split Tube Furnace with an 80mm diameter quartz tube, mechanical vacuum pump, and three-channel gas-flowing system. It can achieve a maximum vacuum up to 10^-2 torr and mix 1-3 types of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.

SPECIFICATIONS

Furnace Construction	Double-layer steel casing with air cooling. The built-in thermostat automatically runs the cooling system when the case temp. > 55°C.
Power Consumption	2.5 KW
Input Voltage	AC 208-240V Single Phase, 50 or 60 Hz
Maximum Temperature	1200 °C
Continuous Working Temperature	1100 °C
Heating Zone Length	Two Zones: 200 mm (8") for each zone and total 400 mm heating zone length
Constant Temperature Zone	If two zones are set at the same temperature, constant temperature zone is 10" (250 mm) long with a temperature discrepancy of +/- 1°C. If using only one zone (center zone), constant temperature zone is 4.3" (110 mm) long with a temperature discrepancy of +/- 1°C.
Max. Heating Rate	<= 20 °C /min (20 °C /min below 800°C; <5 °C /min over 1000°C)
Temperature Accuracy	+/- 1°C
Heating Elements	Fe-Cr-Al Alloy doped by Mo
Temperature Controllers	Two precision temperature controllers to control two zones separately. PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Built-in overheating & broken thermocouple protection. Over temperature protection and alarm allows for operation without attendant(s). +/- 1 ºC temperature accuracy. RS485 Communications Port. Optional: The furnace may be operated by PC by installing two control modules. Please order the MTS-02 control modules at extra cost. The new version of the PC module is now compatible with Lab View 05/08/2014 If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you order a computer laptop from us to avoid software installation problems. For more information please click here.
Tube Size and Materials	Quartz Tube: 80 OD x 72 ID x 1000 L
Digital Vacuum Gauge	Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases. Gauge is installed on the vacuum flange (right side) of the tube furnace and provides a wide measure range (10^^-5 ~ 1000 torr) Optional: click the pic below to order the Constant temperature control module.
Vacuum Sealing Flanges	Two stainless steel flanges with KF25 port, vacuum gauge, and valves included. Min. vacuum pressure achieved by a mechanical pump is 5.5 m-torr. (5.5x10^^-3 torr). The pressure can reach 10^^-5 torr using mechanical + molecular pumps. The leaking rate is < 5 m-torr/min and stable vacuum pressure after 24 hours is < 2 torr. Click the picture below to get details of both charts and data measured by CE certified vacuum meter: Note: For the 24-hour curve display the time segment through 08:00:00~21:10:00 in X-axis is skipped over in the chart; therefore, a steep variance is present.
Oxygen Monitoring	An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation at extra cost. Please click the picture below to learn more:
Vacuum pump	156 L/m Double Stage Rotary Vane Vacuum Pump with Exhaust Filter (220V single phase) and stainless steel hose tube are included for connecting to the tube furnace. Max. archivable vacuum pressure is 10^^-2 torr. Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution VPC-MV. This is a vacuum pressure regulating system with a motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr.
Gas Mixing Control Station	Three gas flow meters (4% accuracy FS) are installed inside the mobile case to enable monitoring of gas flowing rates (three different kinds of gases in total). 1) Compact direct read flow meter, 10-100 cc/min. 2) Compact direct read flow meter, 16-160 cc/min. 3) Compact direct read flow meter, 25-250 cc/min. One pressure meter is installed inside the mobile cart which is able to monitor the pressure of the mixing tank.
Valves	Four stainless steel valves are installed in the side panel of a mobile cart to control the mixing of three inlet gases separately
Laptop, software & WiFi Control (Optional)	Brand new laptop with Microsoft Windows 11 and Microsoft Office 2013 (30 days free trial) for immediate use. *Labview Based Temperature Control System (MTS01)* enables the user to edit temperature profile, manage heat-treatment recipes, and record and plot data for MTI furnaces. A wireless remote control provides up to 50 meters of operating range. The above features are available upon request at an extra cost (up to $1,000). Please contact us for more information. *Note:* The software is only compatible with MTI’s Yudian Temperature Controller
Compliance	CE Certified All electric components ( >24V) of the furnace are UL / MET / CSA certified, not including the gas mixing system, vacuum system, and plasma generator The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.（ please click marks below to learn details )
Application Notes Click here to learn about the installation of a gas regulator	Please click here to see our typical temperature profile calibration result at various temperatures. From 7/15/08, MTI calibrates each furnace by NIST certificated Omega CL3515R precision Temperature calibrator, and pre-set temperature off (SC value) in the controller before shipping. In order to obtain an accurate temperature inside the tube furnace, you need to calibrate the temperature by yourselves. Please click here to learn how. How to set up a ceramic tube and vacuum flange for MTI Tube Furnace. Tube furnaces with alumina tubes are designed for using under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa The flow rate for gases should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C

Dimension:

Furnace: 550 x 380 x 520 mm
Bottom Mobile case: 600 x 600 x 597 mm Each

Net Weight:

~ 60 kg

Shipping:

Shipping Weight: 750 lbs
Shipping Dimension: Three Pallets: 48"x40"x45" each

MTI offers a One-Year limited warranty with lifetime support(may cause a fee) for this product.

The MTI One Year Limited Warranty does NOT cover

Consumable parts such as O-rings, crucibles, screws, washers, etc.
Any damage and rust resulting from improper storage or maintenance.
Any damages caused by the use of corrosive and acidic gases.
Any damage resulting from failing to adhere to the individual product's specific operation requirements, such as water cooling, venting, etc.

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