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24"L 3 Zone Tube Furnace w/ Hinged Flange & Quartz Tube (80-130mm, 1200C Max) - OTF-1200X-III-SHG

24"L 3 Zone Tube Furnace w/ Hinged Flange & Quartz Tube (80-130mm, 1200C Max) - OTF-1200X-III-SHG

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OTF-1200X-III-S is CE certified and UL Standard 24" Long ( 6"+12"+6") split-able three-zone tube furnace with quartz tube (size selectable) and hinged type flange. Such configuration allows easy sample loading/ unloading. Three 30 segments of temperature controllers are installed with K-type thermal couples. Microprocessor-based self-tuning PID provides excellent control with no overshooting and +/- 1 °C accuracy. It is an excellent furnace for sample annealing, diffusion, and sintering in the various gas atmosphere up to 1200°C. (Please select the tube size in the options bar to view the price and model)
SPECIFICATIONS:
Furnace structure
    

  • Double-layer steel case with two cooling fans which ensure low surface temperature;
  • Energy-saving high purity fibrous alumina insulation; 
  • Two fibrous ceramic tube blocks are included for blocking heat radiation from inside of the tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating).
  • Quartz block (Optional) is ideal for more cleanness and higher achievable vacuum.
  •              click here to choose a crucible
Rated voltage AC 208-240V Single Phase, 50/60 Hz (40A breaker required; Powder cord is included without plug)
Power consumption 6 KW Max.
Heating elements Fe-Cr-Al Alloy doped by Mo
Heating zone length
  • Three zones: 610mm (24") in total
  • Z1-Z2- Z3152.4mm (6") + 304.8mm (12") + 152.4mm (6")
  • +/-1ºC Constant Temperature Zone: 260 mm length
  • +/-2ºC Constant Temperature Zone: 480 mm length (click the pic below for detail)
Fused Quartz Tube(Please choose from product option) Model: OTF-1200X-III-SHG-80-UL
80 O.D x 72 I.D x 1200 L (mm)
2" wafer Max.
Model: OTF-1200X-III-SHG-4-UL
101 O.D x 92 I.D x 1200 L (mm)
3" wafer Max.
Model: OTF-1200X-III-SHG-5-UL
130 O.D x 122 I.D x 1200 L (mm)
4" wafer Max.
Warning: The tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.12 Mpa (absolute pressure)
Heating temperature
  • Max. Heating Temperature: 1200°C at flowing gas 
  • Continuous Heating Temperature: 1100°C at flowing gas 
  • Max. The heating temperature at Vaccum 1000°C 
  • Max. Heating Rate: 20°C/min
Temperature Controllers
   
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
  • Built-in overheating & broken thermocouple protection.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • Three K-type thermocouples (one for each zone).
  • RS485 Communications Port.
  • Optional:
    • The furnace may be operated by a PC by installing a control module. Please order an MTS-02 control module at extra cost. 
    • The new version of the PC module is now compatible with Lab View 05/08/2014
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you order a computer laptop from us to avoid software installation problems. For more information please click here.
European Temperature Controllers (optional upgrade)
  • 1 heating channel
  • 1 programs of 8 or 24 segment
  • Alarm Relay: Form 'A' and Form ‘C’ built-in 
  • Digital Communications: RS485
  • Temperature Accuracy: ± 0.1ºC
  • Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
Vacuum Flange and Gauge



  • Hinged type flanges are installed on both ends for easy sample loading/unloading;
  • KF25D adapter installed on left flange with a precision digital vacuum gauge;
  • SS needle valve with 1/4" pipe connector installed on right flange;
  • Max. vacuum pressure can reach 10^-2 torr by mechanical pump and 10^-5 torr by the molecular pump;
  • Optional: you may choose our molecular vacuum pump station for higher vacuum
Optional Part In order to build a complete CVD system, you may need a bubbler or gas delivery system, and a quartz wafer Carrier. . Please click the picture below to choose:
  
Laptop, software & WiFi Control(Optional)
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) 
  • Labview Based Temperature Control System (MTS01)enables users to edit temperature profile, manage heat-treatment recipes, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters of operating range.
Compliance
  • CE certified
  • NRTL or CSA certification is available upon request at extra cost

Application Notes

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STANDARD PACKAGE WITH FURNACE:
No. NAME Qty PIC OTF-1200X-III-SHG-80 OTF-1200X-III-SHG-4 OTF-1200X-III-SHG-130
1 Compact Digital Vacuum Gauge &
Controller with Power Supply (U to 10-4Torr), 
1 pc
ECVM-211 CVM-211 CVM-211
2 Fused quartz tube 1 pc QZTube-80D-48 QZTube-100 QZTube-130
3 Alumina fiber foam tube block 2 pcs T-block-70 F-T-block-92 F-T-block-125
5 Hook for moving the sample
FLG-kit-2 FLG-kit-2 FLG-kit-2
6 Metric Hex-wrenches 1 set
7 Vacuum Flange 1 pair
FL-80KF25-HG FL-101KF25-HG FL125KF25H


AVAILABLE OPTIONAL ACCESSORY:

Part No.
Description
Quick Link
MTS02 Computerized temperature Control System

High vacuum station (Mechanical pump + turbo molecular pump.)

Gas mix station (Float flow meter / Mass flow meter) (2, 3, 4channels selectable)

Compact Flow Meter (float flow meter / mass flow meter)
QBlock-90 90mm O.D heat-insulating quartz block 

Quartz Boats /crucible /container /sample holder
FM-Cart
Heavy Duty Mobile Car for All MTI Tube and Box Furnaces

 

Dimensions Info:

  • Production Dimension: 750mm x 525mm x 670mm (L x W x H)
  • Net Weight: 70 kg

Shipping Info:

  • Shipping Dimension: 65" x 45" x 35" (L x W x G)
  • Shipping Weight: 340lbs

MTI offers a One-Year limited warranty with lifetime support(may cause a fee) for this product.

The MTI One Year Limited Warranty does NOT cover

  • Consumable parts such as O-rings, crucibles, screws, washers, etc.
  • Any damage and rust resulting from improper storage or maintenance.
  • Any damages caused by the use of corrosive and acidic gases.
  • Any damage resulting from failing to adhere to the individual product's specific operation requirements, such as water cooling, venting, etc.
Manufacturer Part Number: