• Double-layer steel structure with air cooling
• Split door design for easy installation of tube
• High purity Al2O3 fibrous insulation designed for maximum energy saving
• Aluminum frame for easy operation
• May be modified into a CVD or vapor phase polymerization furnace upon request at the extra cost.

     

Power

3 KW

Voltage

208 - 240VAC, Single Phase, 50/60 Hz 

Max. Temperature

1100^oC ( < 1 hour )

Continuous Temperature

1100^oC

Max. Heating Rate

<= 15 ^oC /min

Tube Size and Materials

Fused quartz tube Φ130 (OD× Φ120ID× 750L, mm

Heating Zone Length

300mm (single zone)

Temperature Controller

• 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
• Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
• Over-temperature protection and alarm allow for operation without attendant(s).
• +/- 1 ºC temperature accuracy.
• Eurotherm 3000 controller is available with +/- 0.1oC accuracy

• Standard 1/4‘’ Barbed fittings with needle valves.
• For supplying high-pressure gas, you may replace the standard barbed hose fitting with the 304SS 1/4" Swagelok® Tube Fitting, please click underlined to order.
• Optional: In order to increase the throughput and achieve high vacuum, you may replace the standard barbed hose fitting with the KF25 adapter, please click the underlined to order.
• Optional: You may also consider using the parts below to increase the vacuum efficiency 
• Please click here to order a digital vacuum gauge for precision vacuum control up to 10^-4 torr 
• You may click here to order a flow meter and install it in the tube flange (see picture below)
• KF25 Stainless steel Bellows and KF25 Quick Clamps
• The furnace can be modified into a fluidized bed with an ALD delivery system for powder coating ( Pic left bottom)

           

Vacuum Level
 

• 10-2 Torr by the mechanical pump
• 10-5 Torr by turbopump
• Please click the picture left column to order the vacuum pump separately.

Laptop & software (Optional)

   

• Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) \
• Labview-Based Temperature Control System (MTS01)enables a user to edit temperature profiles, manage heat-treatment recipes, record, and plot data via Laptop 

Click here to learn the installation of a gas regulator

• Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars
• Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn about the installation of a gas regulator.
• The quartz tube furnaces only can be used up to 1000°C under vacuum pressures