OTF-1200X-VT-III-50 is a Three Heating ZoneSplit Vertical Tube Furnace with a vacuum-sealed 50 mm diameter quartz tube. It can achieve faster sample heating and quenching in vacuum or gas flow and use for PVD, CSS or CVD coating. Three precision temperature controllers provide 30 segments heating and cooling program with +/- 1°C accuracy independently. The vertical tube furnace is installed in a mobile cart for easy moving.
SPECIFICATIONS:
Furnace Structure
|
- Double-layer steel structure with air cooling to keep case temperature <65°C
- High purity fibrous alumina insulation with a Special coating to ensure max. energy saving
- Foam ceramic blocks with alumina coating are included, which is hanged on top and bottom of flange to protect O-ring from being damaged by heat radiation.
- The wheel is installed on the split top cover.
|
|
Power
|
4.8KW (30Amps circuit breaker is recommended) |
|
Voltage
|
AC 208-240V Single Phase, 50/60 Hz |
|
Max. Temperature
|
1200°C (<1 hr) each zone |
|
Continuous Temperature
|
1100°C for each zone |
|
Max. Heating Rate
|
<= 20°C/min. |
|
Temperature Accuracy
|
+/- 1°C |
|
Tube Size and Materials
|
- One 1200mm length quartz tube is included
- OD: 50 mm, ID. 44 mm
- Foam ceramic blocks with alumina coating are included, which is hung on top of the flange to protect O-ring damaged by heat radiation
- The furnace can be modified for Ø50 - Ø130 mm quartz tube.
|
|
Heating Zone Length
|
- Heating Zone: Total: 530 mm 135 mm +260 mm + 135 mm )
- Constant Temp. Zone: ~ 350 mm within +/- 2 oC
|
|
Temperature Controller
|
- MET certified 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
- Built-in PID Auto-Tune function with overheating & broken thermocouple broken protection.
- Over-temperature protection and alarm allow for operation without an attendant.
- RS485 Communication Port.
- You may upgrade the controller to Eurotherm 3000 for +/- 0.1oC accuracy
|
Vacuum Sealing Flange
|
|
|
Vacuum Level
|
-
10E-2 Torr by a mechanical vacuum pump
-
10E-5 Torr by molecular pump
-
Leak rate < 5 mTorr / min.
|
|
Heating Element
|
1300°C Fe-Cr-Al Alloy doped by Mo
|
|
Laptop, software (Optional)
|
- Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial)
-
Labview Based Temperature Control System (MTS01)enables users to edit temperature profiles, manage heat-treatment recipes, record, and plot data for MTI furnaces.
- A wireless remote control provides up to 300 meters of operating range.
|
| Compliance |
- CE Certified
- NRTL or CSA certification is available at extra cost.
|
|
Application Note
( We may help you to build customized flange to meet your application at extra cost )
|
-
- Please click the picture below to learn how to quench sample in gas flow and vacuum
- Approach#1: Traditional wire cut and free-falling ( Fig. 1 & 2 )
- Approach#2: Electromagnetic release and free-falling. (Fig 3 & 4 )
- The furnace can be modified into an HPCVD ( hybrid physical-chemical vapor deposition ) furnace via DIY a sample susceptor ( click picture below-left to see how )
- The furnace can be used for brazing of two flat < 1" diameter sample via top dead weight under vacuum at <1000° ( click picture below -right to see how )
|
|
Warning
Click here to learn more about the installation of a gas regulator.
|
- The tube furnaces with quartz tube are designed for use under vacuum and low pressure <0.2 bar / 3 psi / 0.02 MPa. Vacuum pressures may only be safely used up to 1000°C. The flow rate for gases should be limited to < 200 SCCM (or 200ml/min) for reducing thermal shocks to the tube.
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
|
Fig. 1 
Fig. 2 
Fig. 3 
