OTF-1500X-6Z- is a six-zone split tube furnace with alumina tube and vacuum-sealed flange working up to 1500°C. Six 30 segments temperature controllers are installed with S type thermal couples and +/ - 1°C accuracy. It is an excellent furnace for high-temperature CVD and annealing application
SPECIFICATIONS:
| Power Input |
22 KW |
| Working Voltage |
AC220+/- 10% VAC three-phase 50/60Hz
( 100 A breaker required) |
| Working Temperature |
Max. 1500°C 30 minutes
Continuous: 800 -1400°C
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| Recommend Heating rate |
5°C/min. |
| Processing Tube |
Material: Alumina
Size: 60 O.D x 51 I.D x 1800mm L
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| Heat Zone Length |
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Six heating zones: 12" +8" + 8" + 8" + 8" + 12"
- Total heating zone length: 1422 mm ( ~ 56")
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Constant Temperature Zone: 800 mm +/- 5ºC. ( If set 6 zones at the same temperature, without zone spacer. If you don't need the zone spacer, you shall inform us in advance)
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The Built-in heating zone space to create a thermal gradient up to 100ºC/ cm
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Temperature Controllers
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- 6 digital temperature controllers for controlling each heating zone
- PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
- Built-in overheating & broken thermocouple protection.
- Over-temperature protection and alarm allow for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
- RS485 Communications Port.
- Optional:
- The furnace may be operated by PC by installing a control module. Please order an MTS-02 control module at extra cost.
- If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
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European Temperature Controllers (optional upgrade)
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- 1 heating channel
- 1 program of 8 or 24 segment
- Alarm Relay: Form 'A' and Form ‘C’ built-in
- Digital Communications: RS485
- Temperature Accuracy: ± 0.1ºC
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Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
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Laptop & software (Optional)
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- Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial)
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Labview-Based Temperature Control System (MTS01) enables the user to edit temperature profiles, manage heat-treatment recipes, and record and plot data for MTI furnaces.
- A wireless remote control provides up to 300 meters of operating range.
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| Vacuum Level |
- 10E-2 torr by quality mechanical vacuum pump
- 10-5 torr by molecular pump
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Thermal Block Placement |
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Two thermal blacks are included. Please click the picture below to learn how to place them inside tube
- You may order flange support to avoid tube rotating ( click Pic below right )
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Heating Elements & Thermal couples
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- 48 pcs 1500ºC grade Silicon carbide rod (14mm Dia. x 150mm heating x 413mm length)
- The heating element is consumable, Please click the picture below to order spare and replacement.
- Six S-type thermocouples (one for each zone).
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Application Notes |
- The tube furnaces with mullite tube are designed for use under vacuum and low pressure < 0.02 Mpa
- Never use graphite crucible and the alumina tube.
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Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
- The flow rate for gases should be limited to < 200 SCCM ( or 200ml/min )
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Vacuum pressures may only be safely used up to 1300°C for all mullite tube furnaces:
- Customized long heating zone up to 1200 mm L with 700 mm uniform temperature zone ( +/- 5°C) 1800mm mullite tube is available upon request; ( click the picture below to see sketch)
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| Compliance |
- CE Certified
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NRTL (UL61010) or CSA certification is available upon request at extra cost.
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