300W 13.56MHz RF Generator for 50 or 80 mm OD Tube Furnace - OTF-PECVD

1 3

300W 13.56MHz RF Generator for 50 or 80 mm OD Tube Furnace - OTF-PECVD-RF

Minimum Order: $20 (equipment), $100 (crystals)

Price: RFQ

SKU:

Choose Your Variant or Type in Any Add-Ons:

Quantity:

Note

View full details

13.56MHz RF generator up to 300W for DIY of PECVD (Plasma Enhanced Chemical Vapor Deposition) for Plasma etching, Plasma cleaning, and plasma polymerization etc.

SPECIFICATIONS

Noise	<50 dB
Output Power	5 -300W adjustable with ± 1% stability
RF frequency	13.56 MHz ±0.005% stability
Reflection Power	200W max.
Matching	Automatic matching
RF Output Port	50 Ω, N-type, female
Cooling	Air cooling
Power	208-240VAC, 50/60Hz
Tube Size	50, 80 or 125 mm OD please select from option bar ( larger diameter coil up to 11" diameter is available upon request )
Application	Combine with MTI's tube furnace to get PECVD system
Dimension
Optional	Please order the oilless pump for zero contamination, quartz tubes, and vacuum flanges can be ordered by clicking the pictures below:
Demo Video
Warranty	One year limited warranty with lifetime support