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Compact DC Magnetron Sputtering Coater With Gold Target for Noble Metal Coating-VTC-16-D

Compact DC Magnetron Sputtering Coater With Gold Target for Noble Metal Coating-VTC-16-D

Minimum Order: $20 (equipment), $100 (crystals)

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VTC-16-D is a Desktop Magnetron Sputtering Coater with a 2" head and height adjustable sample holder. It is designed for thin-film coating for noble metals (Au, Ag, Pt), especially for coating conductive gold film on SEM samples.One 2" gold (4N) target is included. To sputter active metals, such as Al, Mg, Zn, or Carbon target, please consider the High Power magnetron sputtering coater or thermal evaporation coater

SPECIFICATIONS
Feature
  • Compact magnetron sputtering coater, for coating conductive noble metal film on SEM samples (Au, Ag, Pt)
  • One 2" gold (4N) target is included
Power
Sputtering Head
  • 2" diameter
  • 500 VDC
  • 0 - 50 mA (max.) adjustable sputtering current
  • Over-current protection
  • Manual shutter for pre-sputtering cleaning. 
Sputtering time
  • 1 -120 seconds adjustable
Vacuum Chamber
  • Quartz glass tube, 165 mm OD. x 150 mm ID x 150 mm Height
  • Please click here to order the spare quartz chamber.
  • KF25 port for vacuum pump. 
  • Ultimate pressure is about 1 Pa via a mechanical pump. (vacuum pump is optional)
Pirani Vacuum Gauge
  • Range: 1e-4 - 1000mbar (1e-4 - 750 torr)
  • Accuracy:
    • 1000 - 20mbar, 3% of reading
    • 20 - 0.002mbar, 2% of reading
  • Repeatability: 2% of reading
Sample Stage
  • 2" diameter
  • height adjustable, 25 - 70 mm from the sample to the target
Vacuum pump (optional)
  • The double stage rotary vane pump EQ-FYP is recommended.
  • A turbopump is also available to achieve 1.0E-5 Torr 
Gas Inlet
  • One 1/4" compression tube fitting as the gas inlet. 
  • One leak valve to adjust the leak rate of Ar gas. 
Target
  • 4N purity gold target is included and preinstalled. (50mm Dia. x 0.12mm
Compliance
  • CE Certified
  • NRTL certification is NOT available temporarily.
Application Notes
  • To use the sputtering coater inside the glove box, the controller and coater base will be separated. (Pic.1)
  • For active metals, such as Al, Mg, Zn, or Carbon target, please consider our High Power magnetron sputtering coater (Pic. 2) or thermal evaporation coater. (Pic. 3)
  • Pic. 1 Pic. 2
     Pic. 3

 

 

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Dimensions Info:

  • Product Dimensions: 500mm x 350mm x 550mm (L x W x H)
  • Net Weight: 20kg

Shipping Info:

  • Shipping Dimensions: 45" x 45" x 40"
  • Shipping Weight: 80 lbs

MTI offers a One-Year limited warranty for this product.

The MTI One Year Limited Warranty does NOT cover

  • Consumable parts, such as graphite dies, O-rings, crucibles, screws, washers, glassware, etc.
  • Any damage and rust resulting from improper storage or maintenance.
  • Any damages caused by the use of corrosive and acidic gases.
  • Any damage resulting from failing to adhere to the individual product's specific operation requirements, such as water cooling, venting, etc.
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