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Compact Spin Coater (8K rpm, 4" wafer Max.) w/ 3 Vacuum Chuck - VTC-100A

Compact Spin Coater (8K rpm, 4" wafer Max.) w/ 3 Vacuum Chuck - VTC-100A

Minimum Order: $20 (equipment), $100 (crystals)

14 in stock

$3,998.00 USD
$3,998.00 USD
Sale Email for Lead Time

SKU:  VTC100A-mach

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VTC-100A is a compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 4". The spinning speed is variable from 500-8000 rpm with two programmable segments. The package comes included with complete accessories for immediate use.
SPECIFICATIONS:

Structure
  • An aluminum casting case to keep spinning stably
  • The liquid disk is made of Polypropylene (PP) to resist most of the corrosive solutions
  • The drainage outlet and vacuum pump connector are on the back panel
  • One filter is included in the standard package. It is used to connect the coater to prevent wastewater from flowing into the pump
  • One oil-less vacuum pump is included in the standard package, Please click here for specification details.

Chamber & Vacuum Chuck 
  • Chamber Diameter: 145 mm
  • 3 sets of PP anti-corrosive vacuum chucks with chuck o-ring come in different sizes (1'', 2'', and 4'')
  • 1 piece of adhesive tape (6'' W x 24'' L) is included for coating irregularly shaped substrates (e.g. Place the irregular substrate on the adhesive tape, then the vacuum chuck will hold the tape by suction)
  • Mini suction cups are available for the small wafer with less than 1" Dia. or substrate with regular ( 5x5, or 10x10mm) or irregular shapes. Please click here to order. at extra cost. ( see picture below right )
               
Vacuum Pump (Not included)
Spin Speed & Time 
  • Digital control panel with TWO programmable segments for different spin times and speeds
  • Spinning speed: 500 - 8000 RPM
  • Spinning Time: 1 - 60s
Liquid Injecting
  • 20mL syringe is used to contain the coating material
  • The syringe holder height can be adjusted and rotated freely along the support rod
 -Pic 1  Pic 2
Input Voltage
  • Spin Coater: 24 VDC with 100 - 240 VAC power adapter, 150W
  • Vacuum Pump: 110VAC or 220VAC please select the voltage in the options bar (10A fuse)
Motor Power 24V DC motor with 150W Max. 
Compliance
  • CE certificated only
  • If you need NRTL certification, please order VTC-100PA ( click pic below )
Warnings
  • Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use a fabric cloth to wipe out the residues that remain in the bow/base.
  • Turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation.
  • For more details about the cleaning procedure, please review the cleaning instructions for the spin coaters.
STANDARD PACKAGE:
Item # Description Qty
1 VTC-100A Desktop Spin Coater 1
2 4" Vacuum Chuck (pre-installed on the machine) 1
3 2" Vacuum Chuck 1
4 1" Vacuum Chuck 1
5 Plastic Glass Cover for operation safety (pre-installed on the machine) 1
6 20mL Syringe for dropping coating solvent on the plate 1
7 Hose for connecting the vacuum pump 1
8 Drain Hose for water outlet 1
9 Blue Adhesive Tape (6" W x 24" L) 1
Optional Parts
Option Oil-less Vacuum Pump, AC 110V or 220V with Filter installed on the pump
(Connect to vacuum pipes to keep water from flowing into the pump) 		 Option
Option Chuck O-ring For VTC200 OR VTC100 Option

 

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Product Dimension:

  • 330.2mm(L) x 254mm(W) x 215.9mm(H)

Net Weight:

  • 15 kg (33 lbs)

Shipping：

  • Shipping Dimension: 40"(L) x 28"(W) x 24"(H)
  • Shipping Weight: 85 lbs

MTI offers a One-Year limited warranty with lifetime support(may cause a fee) for this product.

The MTI One Year Limited Warranty does NOT cover

  • Consumable parts such as Graphite dies, O-rings, crucibles, screws, washers, etc.
  • Any damage and rust resulting from improper storage or maintenance.
  • Any damages caused by the use of corrosive and acidic gases.
  • Any damage resulting from failing to adhere to the individual product's specific operation requirements, such as water cooling, venting, etc.
Manufacturer Part Number: