VTF-2200X-TSSG is an ultra-high temperature TSSG (top seed solution growth) furnace for growing SiC or Sapphire via flux solution at 2000 degrees. The furnace is heated by an induction coil with a 4" dia graphite crucible and an 8" dia. hermetic quartz chamber. Temperature is detected by a type C thermocouple and controlled by a Eurotherm 3000 series temperature controller. It also equips a precision pulling device with a minimum pulling rate of 0.6 mm/hr and a minimum rotation speed of 0.1 rpm. It can be operated under vacuum, inert gas flow, or reducing environment.
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- 208 - 240VAC, three phases, 50/60Hz
- 17 kW Max. A 60 A power panel is required.
- 10-foot-long 6/4 AWG UL-approved power cable is included.
- The power plug is not included. Compatible plugs are available here.
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Induction Heating System
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- Max.Input Power: 15 KW
- Output Frequency: 20 - 100 kHz
- Duty Cycle: 100%
- Induction Coil: 220 mm(ID) x 65mm(H)
- Cooling: Water
- Control mode: PID or manual
- Protection: water flow interlock, over-temperature, and overpower protection
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Heating Chamber
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- Quartz tube: φ216mm(OD) x φ206mm(ID) x 500mm(H)
- Top flange: This special flange with one gas outlet and a pulling device.
- Bottom flange: Special flange with a gas outlet, KF25 vacuum port, and 1/8" thermocouple feedthrough.
- Vacuum port: KF25 port with a valve.
- Max. vacuum level: 10-5 torr by turbopump
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Crucible and Thermal Insulation
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- One high-purity graphite crucible with a lid: Ø114 OD x Ø100 ID x 142 H (mm)
- Max. effective capacity: 750 ml (The melt should be less than 2/3 of the max volume)
- Thermal insulation layer: 45 mm-thick three-layer graphite felt
- Note: the graphite felt and the crucible is consumable. Spare parts are available.
- Crucible rotation (optional): The graphite crucible can be rotated at 0.1 - 23 rpm for better temperature uniformity.
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Temperature Control
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- Temp. Controller Eurotherm 3000 series controller with +/- 0.1 °C accuracy
with 28 programmable segments.
- Heating rate: 0~60ºC / min (suggestion at =< 5ºC)
- Working Temperature: 2000°C continuous (2200ºC less than 1 hr)
- Thermocouple: 1/8" type C thermocouple is placed against the bottom of the graphite surface.
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Pulling and Rotation Device
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- The pulling device is high vacuum compatible with SS bellow tube.
- Pulling rod: 28 mm water-cooled SS rod
YSZ or Alumina rod is available upon request
- Pulling rate: 0.8 - 50 mm/h (Slower speed is available upon request. Up to 0.06 mm/h)
- Fast pulling rate: 40 mm/min
- Max Travel Distance: 300 mm
- Rotation Speed: 0.1 - 23 rpm (Slower speed is available upon request up to 0.03 rpm)
- Optional recirculating water chiller for cooling seed rod:
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Control Panel
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- 7" touch screen control panel for programming all parameters
- Temperature programs
- Seed rod rotation speed
- Pulling speed
- Store up to 5 recipes.
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Vacuum Pump
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- A vacuum pump or pumping station is recommended but not included.
- Vacuum level: 10-2 torr via a mechanical pump
- 10-5 torr via a turbopump
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Water Chiller
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Dimension
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Weight
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200 kg
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Warranty
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- One-year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement in the related products below.)
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Compliance
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- CE Certified
- NRTL(UL61010) or CSA certification is available at extra cost.
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