Furnace Features
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- Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
- Heated by shortwave IR tube lamps for fast heating
- Two heating zones, 195 mm each, a total of 390 mm in length for HPCVD
- Two sliding sample holders for easy loading/retrieving samples or fast cooling under ambient conditions.
- A retractable bellow is an option for the flange assembly, which allows flash heating and fast cooling under inert environment (optional).
- Vacuum flanges and the digital vacuum gauge are installed for immediate use.
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| Power |
- AC 208-240V, single-phase, 50/60 Hz
- MAX 24 kW, 100 A power supply required. (Max. peak experimental current: 78 A).
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| Heating Element
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- 16 pcs 1.5 kW halogen heating tubes, ( OD = 13.3 mm, L= 390 mm )
- Standard working life: 2000 hrs. ( depends on the heating rate )
- The halogen light tube is consumable. Please click the picture left to order spare.
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| Max. Temperature |
- 900°C max (< 10 minutes )
- 800°C (< 30 minutes )
- 600°C (continuous operation)
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| Temperature Accuracy |
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| Max. Heating Rate |
- RT ~ 800ºC: 50 ºC/s
- 800 ºC ~ 900 ºC: 10 ºC/s
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| Max. Cooling Rate |
- 60 ºC/min under 200 mTorr environment
- 117 ºC/min under atmospheric pressure
- 10 °C/min slowest
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| Process Tube Size |
- High purity fused quartz tube
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Φ110 (OD) × Φ106 (ID)× 740 (L) mm
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| Sliding Rails |
- Dual sliding rails made of Cr plated steel
- Sliding rail length: 400 mm
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Thermocouple
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- Two K type, 1/4" Dia x 24" length
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Temperature Controller
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- Two temperature controllers for controlling two zones independently via SCR
- PID automatic control with up to 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
- Built-in thermocouple broken protection.
- Over-temperature protection and alarm allow for operation without attendant(s).
- ± 1 ºC temperature accuracy for dwelling.
- RS485 Communications Port.
- PC Control:
- An MTS-02 control module is included for PC control on this furnace.
- The new version of PC module is now compatible with Lab View 05/08/2014
- A laptop PC can be ordered for $500 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping. For more information please click here
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Vacuum Flanges
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Vacuum Level
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- Limited by the vacuum pump
- 10^-2 torr can be achieved by the mechanical pump
- 10^-4 torr can be reached by molecular pump
- The pump is not included. ( please click the picture below to order )
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Water Chiller (optional)
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- Cooling water is required for the flange set.
- Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
- We suggest EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below).
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Laptop, software & WiFi Control (Optional)
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- Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
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Labview Based Temperature Control System (MTS01)enables the user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
- A wireless remote control provides up to 300 meters of operating range.
- The features above are available upon request at an extra cost (up to $1,000). Please contact us for more information.
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Note: The software is only compatible with MTI’s Yudian Temperature Controller
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Compliance
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- CE Certified
- NRTL(UL61010) or CSA certification is available upon request at extra cost. （ please click marks below to learn details )
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Application Notes
Click here to learn the installation of a gas regulator
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- Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.12 MPa (absolute pressure).
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
- The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
- Click here to learn how to set up a quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
- Quartz tubes should be replaced after every 10th use to ensure the best performance.
- Samples should never be placed on the tube directly; please order crucibles and boats from here.
- After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can below.
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