VBF-1200X-V9 is a Vertical vacuum-sealed furnace. It equips an Ø200×Ø190×H425 mm quartz tube chamber with stainless steel flange and valves, which can achieve a vacuum of 10-5 via a Torr turbopump. It is designed for calcining or annealing semiconductor wafers (up to 8") under vacuum or various other gas atmospheres with a temperature of up to 1100°C.
SPECIFICATIONS
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Power
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- Voltage: Single-phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed)
- 3 KW max.
- Note: Power cable included, but without the plug. Please install a plug on your own or click the link below the picture to choose a plug according to your country or your lab requirements
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Working Temperature
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Heating Rate
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- <20°C/ min
- Recommended: 10°C/ min
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Heating Elements
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Quartz Tube & Effective Heating
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Vacuum Flange
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- Stainless steel vacuum flange with dual high-temperature silicone O-rings with water cooling jacket
- One 1/4 gas inlet and one gas outlet with needle valves.
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One bored Al2O3 foam refractory block (188 Dia x 80 mm) is included. A similar quartz block is also available. The
- K25 port is built in for connecting to the vacuum pump
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Mechanical Vacuum Gauge(included as standard accessory), which ranges from -0.1 to 0.15Mpa
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Water Cooling
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A water-cooling jacket has been built inside the flange to protect the vacuum sealing assembly from melting at over 200°C. 16L/min water flow required.
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Temperature Controller
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- An NRTL-certified digital temperature controller is included
- Proportional–integral–derivative control (PID control) and auto-tune function
- 30 segments programmed with ramping, cooling, and dwelling steps
- Built-in over-temperature alarm and thermocouple failure alarm
- +/- 1 ºC temperature control accuracy
- THE Default DB9 PC communication port is included for connecting to the PC
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Eurotherm Temperature Controller is available at an extra cost with +/-0.1°C accuracy
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Options
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Digital Pressure Gauge (optional) A gas-type independent(above 10mbar) digital vacuum gauge with a wide range between 3.8 x 10-5 to 1125 Torr. (Click Pic. 1 to order)
- You may choose a gas mixer to deliver multiple gases with control over gas composition and flow rate (click pictures below to order separately).
The furnace can be modified into a faster heating and cooling furnace ( Pic. 3)
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Vacuum Pressure
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- Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials, etc. By using KFD25, stainless steel pipe, MTI's two-stage mechanical pump, and KF25 Ball valve, the furnace can achieve vacuum levels below:
- 10-2 torr via mechanical pump within 30 minutes without thermal Block
- 10-5 torr via turbo-pump within 30 minutes with the Quartz Thermal Block at 900 °C
- Optional:
- The vacuum pump and pipe are not included. Please click Pic 1 to order
- For achieving a higher vacuum level, a Turbopump Station is necessary. (click Pic.. 2)
- Spare sealing O-ring is available at extra cost (click Pic 3)
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KF25 Right-Angle Valve for quick connection to KF25 Bellows (click Pic 4)
 Pic. 1  Pic. 2 Pic. 3  Pic. 4
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Options
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You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate (click pictures below to order separately).
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Compliance
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- CE Certified
- NRTL or CSA certification is available upon request at extra cost.
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Warning
Click here to learn how to installation of a gas regulator
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- Tube furnaces with quartz tubes are designed for use under vacuum and at low-pressure < 0.2 bars
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
- A maximum temperature of 1000°C should be imposed on all quartz tube furnaces to avoid the quartz tubes undergoing deformations under vacuum.
- The flow rate for gasses should be limited to < 200 SCCM for reducing thermal shocks
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