The VBF-1100X-RTP-ASD is a fully automatic bottom-loading rapid heating and cooling furnace with a Φ200mm quartz tube and an air-tight flange. It utilizes shortwave infrared lamps as heaters, achieving heating rates of 50°C/sec and a maximum temperature of 1100°C. It is an excellent tool for preparing single-atom catalysis, and annealing a wafer up to 6".
The system supports multi-unit control via a single PC, communicating with robotic systems for continuous, high-throughput sample sintering. It enables remote and local control of vacuum, gas supply, sintering, and furnace operations. Combining with a robotic arm, the furnace can be operated in autonomous mode
SPECIFICATIONS
| Power Supply |
Three-phase AC 208V, 50/60Hz
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| Maximum Power |
18 kW
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| Features |
- Ultra-fast Shortwave Infrared Heating rate of up to 50°C/s.
- Seamlessly integrates with robotic arms for efficient and automated sample placement.
- Automated Process Execution – sample loading/unloading, flange, inert gas purging, automated gas flow control, heating, temperature holding, and cooling via a Laptop
- Supporting multiple cycle operations
- High-throughput sintering Capability by deploying multiple units with the help of a single robotic arm.
- A dual-layer Chamber with an Air Cooling System ensures efficient thermal management and system durability.
- Integrated Vacuum Control with a resistance vacuum gauge, enabling micro-positive pressure control (103,000–120,000 Pa) to maintain stable furnace pressure.
- High-purity alumina Fiber Insulation provides superior energy efficiency and thermal insulation.
- Comprehensive Data Logging software records temperature, pressure, and other critical parameters, with the ability to upload data via communication interfaces.
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| Thermocouple |
K-type thermocouple
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| Heating |
- Maximum Operating Temperature: 1100℃ (≤ 30 minutes)
- Long-Term Operating Temperature: 1000℃
- Heating Elements: 12 shortwave infrared lamps, 1.5 kW per lamp
- Heating Zone: Φ210mm × 100mm
- Heating Rate: Room temperature to 900℃: Recommended 10℃/s, Maximum 50℃/s
- Cooling Rate (in a sealed furnace environment):
- 800℃ to 350℃: 55℃/min
- 350℃ to 200℃: 5℃/min
- Cooling Rate (in an open furnace environment):
- 800℃ to 350℃: 200℃/min
- 350℃ to 50℃: 35℃/min
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Temperature Control
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- PID Automatic Temperature Control via touch screen on a separated unit
- Intelligent 50-segment programmable temperature control
- ±1℃ Temperature Control Accuracy (Optional upgrade: ±0.1℃ with Eurotherm controller)
- High-precision SCR (Silicon-Controlled Rectifier) intelligent power regulation:
- Default DB9 PC communication port for remote monitoring and control.
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Stainless Steel Flange Sealing System
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- A set of water-cooled sealing flanges
- The upper flange has a resistance vacuum gauge, K-type thermocouple, mechanical pressure gauge, and G1/4 double ferrule gas inlet.
- The upper flange has a KF25 vacuum port reserved.
- The quartz tube plug and sample stage are placed on the lower flange.
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Sample Stage and Tube Block
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- Tube Block: Made of white quartz, with two white quartz baffles fixed by three ceramic rods.
- Sample Stage: Diameter: 105mm, featuring a rectangular recess (76×58mm) for sample placement (customizable based on customer requirements).
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| Software |
- Operation software is included to connect PC
- Supports multi-units
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Set temperature profile, gas flow rate, and sample loading/unloading cycles.
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With the help of a robotic system(optional at extra cost) can execute the following workflow:
- Loads the sample and closes the chamber door automatically.
- Vacuum evacuation and purging, followed by a protective gas introduction (also configurable for air sintering or vacuum sintering).
- Multi-segment heating, holding, and cooling program execution (up to 50 segments).
- Stops gas supply, and the chamber door can open at 300°C for sample exchange.
- Open-source software supports embedded loop process control for robotic integration.
- The entire process is automatically recorded and uploaded via communication protocols.
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Software displays the following parameters:
- Furnace tube pressure values (including vacuum level).
- Built-in mass flow controller (MFC) with a range of 0-5000sccm.
- Cleaning Cycles: 0 to 3 cycles,
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Automated Robotic Assistance (Optional)
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- Rated Load: 5 kg
- Working Radius: 900 mm
- Maximum Arm Reach: 1096 mm
- Rated Voltage: DC 48V
- Robot Weight: 25 kg
- Repeat Positioning Accuracy: ±0.02 mm
- Communication Protocols: TCP/IP, Modbus, Wireless Network
- Typical Power Consumption: 150W
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Water Chiller (Optional)
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KJ6500
- Power: 220-415 VAC, 3 phase
- Frequency: 50 Hz/60 Hz
- Nominal Cooling Capacity: 51880 BTU/h, 12897 Kcal/h
- Compressor Power:
- 4.6 kW, 6.16 HP(50Hz)
- 5.12 kW, 6.86 HP(60Hz)
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Vacuum System (Optional)
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Application Notes
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