Power

• 208-240 VAC, 50/60 Hz, 3 phase
• 15 kW
• A 10-foot power cord is included. The power plug is not covered

CVD Chamber


   

• Quartz chamber:              Ø8.5" OD × 20" H (Ø216 mm OD × 500 mm H)
• 6" graphite wafer stage:   Ø165 OD × Ø155 ID × 50 mm H with an Ø8 mm hole at the back. 
• Thermal insulation:           graphite felt
• Gas lines:                         1/4" compression tube fittings as gas inlet and outlet.
                                           1/4" compression tube fittings as precursor inlet. 
                                           KF16 port for Pirani vacuum gauge.
                                           pressure relief valve @ 3 psi.
  
• Thermocouple:                 1/4" thermocouple feedthrough with a C-type TC. 
• Observation window:        Ø35 mm
• Vacuum port:                    KF25

•  4" boron nitride shower head (orifice: Ø0.5 mm) designed for high-temperature uniform coating. 
•     

 Precursor Evaporator (Bubbler)

• 100 ml precursor bubbler made of 316 stainless steel. 
• one heating jacket, 150°C max, K type T/C
• The gas delivery line is covered by heating tape (150°C max) to prevent vapor condensation. 

Induction Heater

• 15 kW 3 phase 208 -240 VAC induction power supply. 
• 30-100 kHz. 
• Built-in interlocks of water flow, overheating, and overpowering. 
• Coil: Ø220 mm ID × 70 mm H, 8 mm copper, 4 turns.
• Cooling water requirement: >30 psi, >6 L/min, T < 30°C

Temperature Control

• Working temperature 1500°C; 1600°C max (<1hr)
• 30 segments for PID programmable heating and cooling 
• Built-in overheating protection and thermocouple failure protection. 
• Temperature accuracy: ±1°C
• Thermocouple: C type, 400 mm L. 

Pressure Gauge

• Capacitance enhanced Pirani vacuum gauge, up to 3.8E-5 torr. 

Vacuum Generation (Optional)

• Pfeiffer oil-free dry scroll pump, 200 L/min
• 110 VAC or 220 VAC
• A cold trap is recommended to condense the volatile precursors. 

Water Chiller
(Optional)

• Digital Temperature Controlled Recirculating Water Chiller
   58L/min, 17K BTU/hr - EQ-KJ6200
  

Gas Mixer (Optional)

• 2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software - EQ-GSL-LCD
  208-240VAC, 50/60 Hz
  Flow rate from 100 sccm - 5000 sccm per channel. 
  

Gas Detector (Optional)

• Honeywell UL Approved Sensepoint Hydrogen Gas Detector, EQ-XCD-H2-LD
  

Dimensions

• 700 × 1300 × 1600 mm (L × W × H

Net Weight

• about 250 kg

Warranty

• Limited 1 year. Consumables are not included in the warranty. 

Application Note

• MTI recommends placing the equipment inside a fume hood in case of any precursor leaks.