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5" Rotary Tube Furnace w/ Feeding & Receiving for Powder PE-CVD & Cleaning - OTF-1200X-III-R5-PECVD

5" Rotary Tube Furnace w/ Feeding & Receiving for Powder PE-CVD & Cleaning - OTF-1200X-III-R5-PECVD

Minimum Order: $20 (equipment), $100 (crystals)

Price: RFQ

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OTF-1200X-III-R5-PECVD is a 1200°C plasma-enhanced three-zone rotary furnace for chemical vapor deposition (PECVD). It is designed for powder surface coating, e.g. core-shell particles, and powder surface cleaning. With the automatic powder feeding and collection system, it is able to simulate powder coating manufacturing process in lab-scale equipment. 
Features
  • Plasma-enhanced CVD with 13.56 MHz RF power supply
  • Three-zone rotary furnace with a heating length of 600 mm
  • Tumbling volume: 5000 ml. Effective volume @ 20-25%
  • 2-liter stainless steel powder feeding and collection system
  • Gas mixers with 4-channel MFCs 
  • Optional PC and touchscreen remote control
 
SPECIFICATIONS:

Power
  • Furnace                 208-240VAC, single phase, 50/60Hz, 4 kW
  • RF power supply   208-240VAC, single phase, 50/60Hz, 0.5 kW
  • Powder feeder      24VDC, 120 VAC, or 208-240VAC, single phase, 50/60Hz, 50W
  • Gas mixer             110-240VAC, single phase, 50/60 Hz, 50 W
  • Vacuum pump (optional): power is dependent upon the pumping capacity.

3-zone Rotary Furnace
  • Working temperature    ≤1100ºC
  • Heating rate                  ≤10°C/min
  • Heating element             NiCrAl: Mo
  • Heating length               600 mm  (150+300+150 mm three zones)
  • Temperature control      PID temperature control
  • Temp control accuracy   ±1°C
  • Rotary speed                  2-10 rpm
  • Tilting angle                   0-15°
Rotary Tube and Flange
  • Quartz tube Ø60×Ø130×1650 mm with mixing blades
  • Stainless steel magnetic fluid sealed swivels with gas inlet/outlet and KF25 or KF40 vacuum port
  • Output Power             5 -300W adjustable with ± 1% stability.
  • RF frequency              13.56 MHz ±0.005%
  • Automatic RF matching
  • Noise: <50 dB.
  • Cooling: Air cooling.

 
  • GSL-4Z-LCD
  • Touchscreen LCD monitor
  • Four mass flow controllers
    • MFC 1      1-500 sccm oxygen
    • MFC 2      1-500 sccm nitrogen
    • MFC 3      1-500 sccm hydrogen
    • MFC 4      1-500 sccm argon
  • Accuracy             ±1.5% F.S.
  • Port size             1/4" compression tube fitting
Powder Feeder and Collection Tank 

 
  • Powder feeder PF-1S, a motorized stainless steel powder feeder with built-in vibration.
  • The estimated feeding rate is about 0- 97 ml/minute. 
  • A stainless steel collection tank ( 2 Liter capacity ) is to collect powder without exposure to air. 
Laptop, software Control (Optional)
  • The software will integrate temperature control, gas MFC control, and Plasma control for remote operation
Compliance
  • CE Certified

 

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Furnace 2000×600×1800mm

Gas mixer 600×600×700mm

MTI offers a One-Year limited warranty for this product.

The MTI One Year Limited Warranty does NOT cover

  • Consumable parts, such as graphite dies, O-rings, crucibles, screws, washers, glassware, etc.
  • Any damage and rust resulting from improper storage or maintenance.
  • Any damages caused by the use of corrosive and acidic gases.
  • Any damage resulting from failing to adhere to the individual product's specific operation requirements, such as water cooling, venting, etc.
Manufacturer Part Number: 

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