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Compact 2 Channel MFC Gas Delivery System with PLC Touch Panel Control- GSL-2Z-LCD-S

Compact 2 Channel MFC Gas Delivery System with PLC Touch Panel Control- GSL-2Z-LCD-S

Minimum Order: $20 (equipment), $100 (crystals)

Price: RFQ

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GSL-2Z-LCD-S is a compact two-channel gas mixer that is designed for the control of 2 types of gasses flowing through vacuum-sealed tube furnaces at a low cost.

SPECIFICATIONS

Mass Flow Controller inside

Note: Other range MFC can be customized at extra cost upon request. 
  • Two Precision Mass Flow Controller ( MFC) inside )
  • Working Temp. : 5~45 ºC
  • Max. Pressure: 3x106 Pa
  • Accuracy: ±1.5% FS
  • Liner: ±0.5-1.5%F.S.
  • Duplicate accuracy: ±0.2%F.S.
  • Controlling Range:
    • Controller 1: 1~ 99 SCCM
    • Controller 2: 1~199 SCCM

Power
  • Voltage: AC 208 - 240V Single phase 50/60Hz
  • Power: 100 W in total
  • May order a 100W transformer to operate at 110VAC ( Click Pic below to order )

PLC Touch Screen

  • 6" color touchscreen control panel to make parameter setting easy.
  • Touchscreen Control and PC remote switchable, RS485 Port and a supplied software are included for remote operation by PC, not compatible with LabVIEW for now. 
Mechanical Pressure Gauge Measurement Range:-0.1~0.15 MPa (0.01 MPa/grid)
Needle Valve 316 Stainless Steel
Gas Pipeline
  • One stainless steel gas mixing tank is built-in
  • Internal pipeline: 1/4" O.D stainless steel
  • External pipeline: 1/4" O.D PTFE
  • Gas Mixing Tank: Φ80X120mm
  • Stop Valve & Fittings
    • 316 stainless steel needle valve, 
    • Φ1/4” Swagelok Tube Fitting
Compliance
  • All components are CE certified
  • NRTL (UL61010) or CSA certification is available at extra cost. 
Oxygen Monitoring ( Optional)
  • An Optional oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture left to learn more:
Related Products
 CVD & PECVD                              Furnace Click pictures below to order bubbler or evaporator for CVD
                                                                  

 

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Dimension:

  • 360mm(L) x 300mm(W) x 190mm(H)

Weight:

  • 8.4Kg

MTI offers a One-Year limited warranty for this product.

The MTI One Year Limited Warranty does NOT cover

  • Consumable parts, such as graphite dies, O-rings, crucibles, screws, washers, glassware, etc.
  • Any damage and rust resulting from improper storage or maintenance.
  • Any damages caused by the use of corrosive and acidic gases.
  • Any damage resulting from failing to adhere to the individual product's specific operation requirements, such as water cooling, venting, etc.
Manufacturer Part Number: 

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