• Turbopump Station with a Scroll Dry Pump - EQ-PAC-LD
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Turbopump Station with a Scroll Dry Pump - PAC-LD

Turbopump Station with a Scroll Dry Pump - PAC-LD

Minimum Order: $20 (equipment), $100 (crystals)

Price: RFQ

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The PAC Pumping Station consists of a high-quality Pfeiffer's High-Speed turbo molecular pump (33L/s) and a 200L/min scroll pump. Large LCD digital can display the instant pressure reading and the information pump's running condition. 600mm x 600m top table can withstand any type of equipment up to 600 Lbs. It is an ideal tool for most of MTI's tube furnaces to achieve high vacuum >10-4 torr
Specifications
Mobile Cart Structure
  • Larger Mobile cart size: 800 (L) x 700 (H) x 600(H), mm 
  • Max. Loading: 600 Lbs on top
Turbo Pump Station
  • Pfeiffer, pumping speed: 33 L/s
  • Port: KF40
  • Other Pfeiffer turbopump station with different flange is also available 
Backing Pump
  • Pfeiffer scroll pump
  • Pumping Rate: 200 L/min 
  • Max. Vacuum 9e-3 mbar (0.4 Pa)
VOLTAGE
  • Please choose the voltage from the options bar.
Control panel One button operation - the diaphragm pump and the turbo molecular pump will start after pressing "start" button.
System controlled spinning speed - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber.
Self-protection - the system will protect the pump from damage by overheating and overcurrent if the leaking rate of the reaction chamber is too high to achieve the high vacuum.
LCD screen - double lines parameters checking interface make the working easier to be handled.
Pump and Accessories
  • Molecular pump with KF40 to T type of Vacuum Tube and KF25 to Vacuum Gauge
  • Vacuum gauge with KF25 port to install to T -tube
  •  1000 mm length SS vacuum bellows with KF40 port to connect to furnace flange
  • One KF40 to KF25 adapter is included to connect the pump to MTI's furnace which has KF25 port on flange
Volume Flow Rate
  • Nitrogen N2 33 L/s
  • Helium He 39 L/s ( 2340L/minute)
  • Hydrogen H2 32 L/s

Compression Rate
  • Nitrogen N2 >1E11
  • Helium He 6*1E6
  • Hydrogen H2 >1E5

Ultimate Pressure

<7.5E-9Torr (1E-6Pa) without any leaking

Start-up Time

2 Min.

Working Range

From 750Torr to <7.5E-7Torr (1E5Pa ~ <1E-4Pa)

Backing Pumping Speed

0.9 m^3/H for 50Hz and 1.0m^3/H for 60Hz 

Duration /max. power

100/110 W

Mains Connection

90-132 V/ 185-265V (selectable)

Weight

50 Kg

Optional Accessories

Combinations of EQ-PAC-LD Turbo-molecular Pumping Station with EQ-VPC-MV Precision Vacuum Pressure Regulating System will be a solution for precisely controlling the vacuum pressure in a vacuum chamber/system. Order Turbo-molecular Pumping Station with Precision Vacuum Pressure Regulating System from product options or Click the picture below for Precision Vacuum Pressure Regulating System
 

Warranty		 One-year manufacturer warranty.(Attention: Improper use will cause all claims for liability and warranties to be forfeited. Improper use is deemed to be all use for purposes deviating from those mentioned in below, especially:
  • Pumping of corrosive or explosive media.
  • Pumping of condensing vapors.
  • Pumping of liquids.
  • Pumping of dust.
  • Operation with improper high levels of insulated heat input.
  • Operation in potentially explosive areas.)
Application Notes
(these parts are NOT included in the standard package)
  • To protect the environment & human health, please use Traps & Filters to minimize exhaust. 
  • Service for the turbopumps is recommended every 4 years under conditions with light gas loads. 
Complaince 
  • TUV Certified ( Turbo pump )
Manual 

Standard Package
 P/N
Description
Quantity
Picture&Link
EQ-KF-Valve-D40 KF-40 Vacuum Right-Angle Valve 1

 EQ-KF-Pipe-D40

 KF-40 SS Vacuum Bellows (1000 mm )
1

EQ-KF-Pipe-D25-600

KF-25 Flexible Stainless Steel Vacuum Bellow (600mm)
1

 EQ-KF-Clamp-D40

 KF-40 Quick Clamp with Rubber O-Ring
4

 EQ-KF-Clamp-D25

 KF-25 Quick Clamp with Rubber O-Ring

 

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