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Compact RF Generator 13.56 MHz 300W with Auto Matching Network for DIY RF Sputtering - RF-300I-LD

Compact RF Generator 13.56 MHz 300W with Auto Matching Network for DIY RF Sputtering - RF-300I-LD

Minimum Order: $20 (equipment), $100 (crystals)

Price: RFQ

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RF-300I is a compact 300W auto-match RF generator with 13.56Mhz frequency, which integrated the auto-matching network together with 13.56 MHz RF Generator into one unit and made installation and operation much easier. It can be operated with MTI magnetron sputtering source to DIY a small RF film coater at a flexible budget.

SPECIFICATIONS:

Input Power
  • 220VAC, 50/60Hz or 110VAC, 60Hz selectable
  • Max. current: 1.5A
RF Power Generator
with auto-matching
  • Output Power: 5 -300W adjustable with ± 1% stability
  • RF frequency: 13.56 MHz ±0.005% stability
  • Matching: Automatic with variable air capacitor
  • Cooling: Air cooling
  • Noise: <50 dB
  • Power: 110 -240VAC, 50/60Hz
  • Dimension: 400 W x 450 D x 80 H, mm
Dimension
Optional Accessories
Click here to order
  • You may order 2" High Vacuum Magnetron Sputter Source For DIY RF & DC Sputtering Coater  together with RF power supply for immediate use
  • High Vacuum Quick Disconnect is included when you order 300W RF generator together with the 2" sputtering source.
  • High Vacuum Quick Disconnect with 0.75" ID (compatible with HVMSS-SPC-2). Use this component to install the HVMSS-SPC-2 sputtering tool onto the baseplate (up to 1” thick) of a vacuum chamber with 1” diameter through-hole 
  • Digital Temperature Controlled Circulating Water Chiller with 6 Liters Tank, 16L / min Flow is available at extra cost, please order separately.
  • 148 cm RF cable is recommended with extra cost (click Pic. right 1 to order)

 

 

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