ALD-1200X-R-4 is a 4" rotation tube furnace combining with two-channel ALD valves and one channel liquid-vapor delivery( Atomic Layer Deposition ) and as well as four channels gas delivery to make the surface coating on powder by both ALD and CVD. The smart design makes ALD more cost-effective and affordable for every research group.
SPECIFICATIONS:
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Control Panel
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- All parameters of Vapor, ALD, and Gas flow are integrated into one mobile cart and controlled by PLC via a 6" touch screen panel:
- Two-Channel ALD valve
- For channels MFC gas delivery
- Please click the picture below to see control interface
 
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ALD valve 
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- Two ALD valves with pulse controller (min 10 ms duration )
- Capable of heating with thermal actuators
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Liquid-Vapor Generator 
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- Automatic liquid-vapor generator is included and connects to ALD valve
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Rotation furnace 
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- Max 1100ºC for continuous heating
- Two programmable precision digital temperature controllers with 30 segments.
- Input power: 208 – 240V AC input, a single phase at max. 4KW
- Rotation speed: 0 - 10 RPM
- 4" quartz Tube as the drawing below
 Four Mixing Blades  Dimension
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Anti-corrosive Pressure Gauge 
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- 3.8x10-5 to 1125 Torr measurement range
- Anti-corrosive, gas-type independent
- High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
- Fast atmospheric detection eliminates waiting time and shortens process cycle
- Easy to exchange plug & play sensor element
- Click the picture to view detail spec.
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Vacuum Pump
( optional)
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- 10E-2 Torr vacuum can be achieved inside the processing tube
- The vacuum pump is not included, suggest you order a dry pump for CVD process by click picture below
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More Bubbler
Optional
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- Click the picture below to order bubbler or evaporator for CVD, and below right ( 1-2) for Constant pressure control module( Pic.right 2)
- Could add Quartz Crystal and thermocouple to monitoring thin film thickness and temperature at extra cost
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Compliance
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- CE Certified
- NRTL or CSA certification is available upon requesat extra cost.
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Application Notes 
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Application
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Manufacturer Part Number:
