OTF-1200X-S-50-DFSL is a dual slidable furnace on the rail. It is a tool for thermal CVD with 2" ODx55"L Quartz tube & flanges and max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C/min. Optional motorized sliding, MFC gas delivery, and RF Plasma generator are available to build a flexible TCVD system easily at a low cost.
SPECIFICATIONS
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Furnace Structure
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- Both furnaces are double-layer steel structures with 1200°C max. working temperature
- Each Furnace has a 200mm heating zone and a 60 mm long constant temperature zone
- One pair of sliding rails are installed on the bottom of the furnace, which allows the furnace to be manually moved from side to side with a max sliding distance 400 mm.
- Hermetic flanges are installed for immediate use.
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Power of furnace
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- AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required
- 2.5 KW in total
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Max. Temperature
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Continuous Temperature
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Heating & Cooling Rates
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Heating Rate:
15°C/sec (RT - 150°C);
10°C/sec (150°C - 250°C);
7°C/sec (250°C - 350°C);
4°C/sec (350°C - 500°C);
3°C/sec (350°C - 550°C);
2°C/sec (550°C - 650°C);
1°C/sec (650°C - 800°C);
0.5°C/sec (800°C - 1000°C);
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Cooling Rate:
15°C/sec (1000 - 950°C);
10°C/sec (950°C - 900°C);
7°C/sec (900°C - 850°C);
4°C/sec (850°C - 750°C);
2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);
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Note:
The max heating and cooling rate is achieved by pre-heat one side of the processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not. |
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Heating Zone Length
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- 200mm( ~8") for each furnace
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Constant Temperature Zone
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Heating Elements
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- Fe-Cr-Al Alloy doped by Mo
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Processing Tube Size
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- Quartz tube
- 50mm O.D x 44mm I.D x1500 mm Length
Optional: S310 high temp alloy tube is available for higher pressure ( 100 PSI ) at the extra cost
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Temperature Controller
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- Two furnaces are PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
- Built-in over-temperature alarm and protection allow for operation without an attendant.
- Two K-type thermal couples are included.
- Optional:
- The furnace may be operated by a PC by installing a control module. Please order an MTS-02 control module at extra cost.
- We recommend you order a computer (laptop) from us to avoid software installation problems. For more information please click here
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Temperature Accuracy
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Vacuum Flanges
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- Stainless steel vacuum flanges with a vacuum gauge are installed on both ends of the tube with heavy-duty support. (Pic. 1)
- Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost. ( click Pic. 2), and water cold flange (Pic. 3)
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 Pic. 1  Pic. 2  Pic. 3
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Sliding Rails
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- Double sliding rails
- Sliding length: 1200 mm
- Two slide-stopping clamps are included for holding the position of the furnaces.
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Vacuum Level
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- Limited by pump ( pump is not included, click on pictures to order )
- 10E-5 torr can be achieved via molecular pump
- 10E-2 torr can be achieved via a mechanical pump.
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Optional for upgrade
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- 1-9 channel gas mixing and delivery models is available ( click picture 2 in below to order )
- 300W RF plasma generator for plasma enhanced processing is available upon request
- You may need a cold trap to condense the exhaust gas
 Pic. 1  Pic. 2  Pic. 3  Pic. 4  Pic. 5
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Compliance
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- CE Certified
- NRTL or CSA certification is available at extra cost ($3500.00).
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Application Notes
Click here to learn the installation of a gas regulator
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Warning
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- Fast sample cooling can be achieved by sliding the heating chamber away. Please wear protective gear such as heat resistant suit & gloves if you intend to do so. DO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT!
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Pic. 1
Pic. 4
Pic. 5
