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Compact RF Generator 13.56 MHz 300W with Auto Matching Network for DIY RF Sputtering - RF-300I-LD

Compact RF Generator 13.56 MHz 300W with Auto Matching Network for DIY RF Sputtering - RF-300I-LD

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Price: RFQ

SKU: : \RF300I

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RF-300I is a compact 300W auto-match RF generator with 13.56Mhz frequency, which integrated the auto-matching network together with 13.56 MHz RF Generator into one unit and made installation and operation much easier. It can be operated with MTI magnetron sputtering source to DIY a small RF film coater at a flexible budget.

SPECIFICATIONS:
Input Power
  • 220VAC, 50/60Hz or 110VAC, 60Hz selectable
  • Max. current: 1.5A
RF Power Generator
with auto-matching

  • Output Power:            5 -300W adjustable with ± 1% stability
  • RF frequency:            13.56 MHz ±0.005% stability
  • Matching:                   Automatic with variable air capacitor
  • Cooling:                     Air cooling
  • Noise:                        <50 dB
  • Power:                        110 -240VAC, 50/60Hz
  • Dimension:                  400 W x 450 D x 80 H, mm
Dimension                           
Optional Accessories



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  • You may order 2" High Vacuum Magnetron Sputter Source For DIY RF & DC Sputtering Coater  together with RF power supply for immediate use
  • High Vacuum Quick Disconnect is included when you order 300W RF generator together with the 2" sputtering source.
  • High Vacuum Quick Disconnect with 0.75" ID (compatible with HVMSS-SPC-2). Use this component to install the HVMSS-SPC-2 sputtering tool onto the baseplate (up to 1” thick) of a vacuum chamber with  1” diameter through-hole    
  • Digital Temperature Controlled Circulating Water Chiller with 6 Liters Tank, 16L / min Flow is available at extra cost, please order separately.
  • 148 cm RF cable is recommended with extra cost (click Pic. right 1 to order)

                        

Operation Video
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Warranty One year limited with lifetime support
Manufacturer Part Number: