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High Vacuum Thermal Evaporation Coater With Six Sources for Perovskite Solar Cells - GSL-1800X-ZF6-PSC

High Vacuum Thermal Evaporation Coater With Six Sources for Perovskite Solar Cells - GSL-1800X-ZF6-PSC

Minimum Order: $20 (equipment), $100 (crystals)

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GSL-1800X-ZF6 is a high-vacuum thermal evaporation coater designed for the deposition of perovskite solar cells, such as Cu, Ag, PbI2, CsBr, and others. Two types of sources can be evaporated at the same time at a high vacuum up to 10-6 torr. It is an excellent and cost-effective coating machine for various material fabrications and modifications.  This coater can be connected with a glovebox upon request

SPECIFICATIONS 

Input Power
  • Input: AC220V±10%, three-phases, 50/60 Hz
  • Total Power required: 8 KW (~32A)

Vacuum Chamber

 
  • Stainless steel (SS304) chamber:  400mm ID. x 400 mm D x 450 mm H, polished finish. 
  • 100 mm observation window
  • Hinged-type door for easy sample loading
  • Motorized shutters for each evaporation boat, 
  • One ISO-100K port for connection with a turbo pump and a gate valve.
Vacuum Pump (optional)
  • 260 L/s turbo molecular pump
    • Vacuum level: 5.0x10-6 Torr ( after 40 minutes of pumping )
    • Limit vacuum: 5.0x10-7  Torr ( after baking at 100 -150°C)
    • Leaking rate: 5.0x10-7 Pa.
    • Vacuum Port: DN 100 ISO-K

A mechanical pump (YTP-550-LD) is required as a backing pump to initially achieve the vacuum level of <1e-2 torr

Evaporation Source
&
Sample Holder

Four evaporation sources are included

  •      One tungsten heating boat with water-cooling without temperature control for high temperature coating up to 2000 °C.   Tungsten heating boat, 70L x 12W x 3H (mm). 
  •     Three resistance coil-heated crucibles for low-temperature coating up to 500 °C with precision temperature control 
  • Sample holder can accept a maximum sample of 150*150mm. Rotation speed: 0-30 rpm
  • Evaporation distance from source to sample holder is up to 60 mm
  • The sample stage with a heating function up to 700 °C
   
In-situ thickness monitor (optional)
  • Quartz crystal microbalance is optional for thickness measurements
  • The accuracy of thickness control is 1.0 Angstrom.
Control Unit
  • Vacuum, thickness, and power control are integrated into one control box
  • The Control Unit is separated from the vacuum chamber for easy moving
Coater in Glovebox (Optional)

Facility Requirement 
  • Space: 250 SF with height > 6 feet
  • Chilled Water: > 16L/minute flowing water required for electrode cooling or using a recirculating water chiller

Application Notes
  • Please check the fabrication process in detail below:
  • https://mtixtl.com/collections/perovskite-solar-cells

Certificate
  • CE certified
  • NRTL or CSA certification is available upon request at the extra cost

 

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MTI offers a Two-Year limited warranty for this product.

The MTI Two-Year Limited Warranty does NOT cover

  • Consumable parts such as O-rings, crucibles, screws, washers, etc.
  • Any damage and rust resulting from improper storage or maintenance.
  • Any damages caused by the use of corrosive and acidic gases.
  • Any damage resulting from failing to adhere to the individual product's specific operation requirements, such as water cooling, venting, etc.
Manufacturer Part Number: 

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