• Double-layer steel casing with air cooling to keep furnace surface temperature lower than 60°C.
• High-purity fibrous alumina insulation for Max. Energy-saving.
• The special refractory coating on the inner increases furnace life.
• Two pairs of fibrous ceramic tube blocks are included to block heat radiation from inside the tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating)
• Split cover with Interlock protection, cut the power if the door opens during the furnace heating process.

• Max. heating temperature: 1500°C (< 1hr) 
• Continuously heating temperature: 1400°C
• Heating rate 10°C /min Max. and cooling rate < 10 °C /min Max. for alumina tube 
• Note: if using alumina tube: Heating rate: 10°C /min Max. and cooling rate < 5 °C /min Max.
• The S-type thermal couple is included.
• 16 pcs SiC rod as heating elements (1500 grade) Pls click pic left to order spare or replacement
• Notice： Customers will install SiC rods on-site by themselves as instruction manual because they are easy to damage during shipping.
• Please notice, for the SIC heating element, it is a consumable part, and not covered by warranty, and usually, its service life is one year.

• Total heating zone length: 390mm
• Constant temperature zone: 150 mm (+/-2°C)
• 

• FA-YD518P-AG temperature controller included.
• Proportional–integral–derivative control (PID control) and auto-tune function
• 30 segments programmed with ramping, cooling, and dwelling steps
• Built-in over-temperature alarm and thermocouple failure alarm
• +/- 1 ºC temperature control accuracy
• Default DB9 / PC communication port

• One pair of stainless steel vacuum flange is included in the package.
• Two pairs of fibrous ceramic tube blocks are included to block heat radiation from the inside tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating)
• For a fast & better vacuum, suggest you use stainless steel pipe ( click to order at extra cost ) 

• Standard mechanical vacuum gauge measures within a pressure range of -0.1 to 0.15Mpa.
  
• OPTIONAL: A gas-type independent (above 10 mbar) digital vacuum gauge with a wide range between 3.8x10^-5 to 1125 Torr. Aside from greater measurement precision, this gauge reduces the risks of chamber explosions caused by the incorrect reading of gas pressures due to gas-type dependency.

             

• Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial)
• Labview-Based Temperature Control System (MTS01)enables the user to edit temperature profiles, manage heat-treatment recipes, and record and plot data for MTI furnaces.

• CE Certified
• NRTL(UL61010) or CSA certification is available at extra cost.

• Please click here to see our typical temperature profile calibration result at various temperatures.
• How to set up a ceramic tube and vacuum flange for MTI Tube furnace
• Proper placement of tube blocks
• The furnace can grow 3C-SiC film on Si; please read the below article to see the procedure

Warning

Click here to learn more about the installation of a gas regulator.

• The tube furnaces with alumina tubes are designed for use under vacuum and low pressure <3 psig
• Attention: A pressure regulator must be installed on your input gas tank
• Never heat the furnace while the gas release valve is closed and a positive pressure condition exists within the furnace chamber. The pressure gauge must be used to closely monitor the chamber condition at all times during the heating process; please open the gas release valve immediately once the chamber pressure has reached over 3 PSI to prevent unforeseeable damage.
• The flow rate for gasses should be limited to < 200 SCCM (or 200ml/min)
•  Vacuum pressures may only be safely used up to 1300°C

• Performance degradation (i.e. furnace cannot reach the maximum temperature of 1500°C) is normal due to aging of SiC heating elements. It is time to replace all the heating elements. Please order the replacements from the standard package list below.

Description

Qty

Pic

OTF-1500X-UL-2

OTF-1500X-UL-3

1

Alumina Foam Block for tube furnace

1 pair

F-T-block-42

F-T-block-65

2

Vacuum flanges

1 pair

FL-50

FL-76

3

alumina tubing

1 unit

TA-50D-M1000

TA-76D-M1000