4'' Dia. Pinned Shower Head for DIY of ALD/CVD - EQ-SH-4
4'' Dia. Pinned Shower Head for DIY of ALD/CVD - EQ-SH-4
Minimum Order: $20 (equipment), $100 (crystals)
Price: RFQ
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This is a 4'' Dia. pinned shower head for uniform gas delivery for DIY of ALD or CVS. It is a necessary tool for developing CVD film on a wafers up to 4'' dia.
Specifications:
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Material: SS 304 for top flange and Aluminium for the bottom showerhead Oring: Silicone Gas Feeding Tube: 14 mm O.D x 6.35 mm I.D |
Pin Hole Size |
0.8 mm Dia. |
Shower |
Special design to ensure uniform distribution and gas/vaper |
| Dimension ( Click picture right for details) |
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| Warranty | 1-year limited warranty with lifetime support |
| Weight | 2 lbs |
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