System Structure
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Two-Zone Rotary Furnace
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- Working temp: 1100ºC Max(<1hrs)., and 1000ºC for continuous heating.
- Two PID temperature controllers with 30 segments programmable.
- Input Power: 208 – 240 VAC, single phase at max. 1.5KW.
- High purity Alumina fibrous insulation for max. energy saving.
- Gear DC motor drives quartz tube with variable speed 2 - 10 RPM.
- Two zones: each zone length 4" (100 mm), total 8" (200 mm) heating zone.
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Plasma RF Power Supply
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- Output Power: 5 -300W adjustable with ± 5% stability.
- RF frequency: 13.56 MHz ±0.005% stability.
- Reflection Power: 100W max.
- Matching: Automatic.
- Power: 208-240VAC, Single Phase, 50Hz.
  
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Evaporation Boat
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- Working temp: 1100ºC Max(<1hrs)., and 1000ºC for continuous heating
- 0.7ml alumina crucible with tungsten heating coil surrounded.
- K type thermocouple inserted for accurate temperature measurement of the source material.
- Working current: <= 30 A.
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Sealing Flanges
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- Standard: 2'' O.D Fused quartz processing tube, please click the pic on the left for details.
- One pair of 1'' SS sealing flange with rotatable gas connector needle valves and are included for immediate use.
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Sealing Flanges
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- A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube.
- Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting the fireline or downstream attachments (such as gas, powder, and electrical delivery lines).
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Tube Rotation Speed
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Vacuum Pump & Gauge
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MFC Gas Mixing Station
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Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control the gas flow rate automatically.
- MFC 1: Gas flow range from 0~100 SCCM
- MFC 2&3: Control range from 0~200 SCCM
- MFC 4: Control range from 0~500 SCCM
- Gas inlet/outlet fittings: 6mm O.D tube fitting
- Power: 208-240VAC 50/60Hz
- Stainless steel needle valves for manually ON/OFF control of gas supply.
- Large PLC touch screen control enables easy flow rate settings
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- Two heating zone design with an individual temperature controller.
- Precise PID control of heating, cooling rate, and dwell time, 30 programmable segments.
- Built-in overheating & broken thermocouple protection.
- Over-temperature protection and alarm allow for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
- Three K-type thermocouples (one for each zone).
- RS485 Communications Port.
- Optional:
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- The furnace may be operated by PC by installing a control module. Please order an MTS-02 control module at extra cost.
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If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
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Dimensions & Weight
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- Furnace: 1400mm L x 600mm W x 1250mm H (with lid opened); Gas Mixing Station: 600mm L x 850mm W x 700mm H
- Net weight: 400 Lbs.
- Shipping Weight: 500lbs.
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Warranty
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One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
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Volumetric Feeder and Collector Tank (Optional)   pic. 1 pic.2
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- EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treating. Please click the pic.1 on the left to order.
- Stainless steel collection tank ( 2 Liter Capacity ) can be installed on the other end of processing tube to gather the fired powder without exposure to air. Please click the pic.2 on the left to see details.
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Note: contact us for customization details.
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Laptop, software & WiFi Control (Optional)
 
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