OTF-1100X-III-VT is a three-zone heated large tube furnace with optional 8 or 11"O.D quartz tube and vacuum flanges. Three programmable temperature controllers are built-in with K type thermal couple, which provides 1000 mm heating length and > 330 mm constant temperature zone up to 1200°C Max working temperature. It is an excellent tool for annealing, diffusing, and sintering processes.
SPECIFICATIONS
Furnace structure
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- A splittable vertical furnace with ~ 12" dia heating chamber.
- Double-layer steel casing with air cooling. The surface temperature of the case is < 70°C.
- Quality fibrous alumina insulation liner for maximum energy saving.
- Two fibrous ceramic tube blocks are included for blocking heat radiation from the inside tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating)
- Aluminum alloy frame with wheel for easy moving.
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| Power required |
- Three Phase, 208V AC, 50/60 Hz 3 phase 380V is optional
- AWG 8# Power cord is included (without plug)
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Max. 30KW (100A breaker required)
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Heating zone
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- Total heating zone length ~1000mm (40")
- Three zones: 330 mm + 330 mm + 330mm
- Constant temperature zone length : 350 mm (if three zones are in the same temperature within +/- 3°C)
- Cross section Temperature tolerance +/- 3°C
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Working temperature
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- Max heating temperature: 1100°C
- Max heating & cooling rate: 10°C/min
- SiC heating elements, a total of 36 pcs
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Temperature Controllers
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- Three Eurotherm temperature controllers are built-in to control each heating zone independently.
- 1 program of 8 or 24 segments for each zone
- Digital Communications: RS485
- Temperature Accuracy: ± 0.1ºC
- Sofware is included for operating by PC
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Vacuum sealing & Flange
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A pair of stainless steel vacuum sealing flange (Hinged Type) and 4 pieces of high temp-resistance silicon O-ring are included in order to achieve the vacuum rate of 10^-2 torr via a heavy-duty mechanical pump. Left Side Flange: stainless steel needle valves, and 1/4" barbed hose fitting. - One 1/4" OD thermal couple insert port is built on the right flange for easy temperature calibration.
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Quartz Tube
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- Can accommodate 8'' or 11" O.D quartz tube with 71" Length, please select tube size in the option bar
- High purity quartz tube, please click the bottom left picture to view.
- Warning: quartz tube is fragile, please handle with care. Warranty does not cover the broken tube by use
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Options
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The tube furnace should be calibrated regularly to maintain temperature accuracy and uniformity. We are providing a simple calibration kit for you to complete this job at an extra cost The complete calibration kit includes (click the underline to see details):
- You may consider ordering turbopump for hi-vacuum up to 10-5 torr ( click pic below right to order )
- 4'' ~ 8'' large size quartz boats
- We can make the furnace into a verticle upon request.
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Product Dimension
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- H 2800mm X W 1050mm X D1250mmClosed )
- H 2800mm XW1600mm X D1700mmOpened
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Net weight
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400kg
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Shipping dimension
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85" x 40" x 70" |
Shipping weight
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1200 lbs
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Warranty
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- One year limited warranty on electrical parts. ( Consumable parts such as processing tubes, o-rings and quartz tube are not covered by the warranty)
- You may order a replacement quartz tube at the link below
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Compliance
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- CE Certified
- NRTL or NRTLCSA Certification is available upon request, additional charges will apply
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NOTE
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| Operation Instructions |
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Warning
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- Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa or 0.12 MPa (absolute pressure).
- Attention: A two-stage pressure regulator must be installed on a gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
- The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
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