OTF-1100X-III furnace is a three-zone tube furnace with optional 11" or 15" O.D quartz tubes and vacuum flanges. Needle valves and, vacuum gauges are pre-installed for immediate use. The electrical actuator enables an easy & hassle-free lid opening. Three 30-segment programmable controllers are built-in with a K-type thermal couple. Microprocessor-based PID control provides excellent control without overshooting and +/- 1ºC accuracy. It has been widely used for materials or chemical labs for sintering all types of new material samples under vacuum or other gas conditions. It is an excellent tool for annealing, diffusing, and sintering processes.
SPECIFICATIONS
Furnace structure
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- Double-layer steel casing with air cooling. The surface temperature of the case is < 70°C.
- Refractory fibrous alumina insulation liner for maximum energy saving.
- Heating element: NiCrAl Resistance Wire
- Two fibrous ceramic tube blocks are included for blocking heat radiation from the inside tube.
- Hinged-type flange with water cold for sample loading at ease
- This furnace can be used as an annealing or diffusion furnace for 12" wafers and uses a quartz boat
- The electrical lid actuator provides easy & hassle-free lid opening
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Structure schematic
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15" ceramic blocks
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Holding 12" wafer |
Electrical Lid Actuator |
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Heating zone
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- Total heating zone length 900mm
- Three zones: 300 mm + 300 mm + 300mm ( 900 mm in total)
- Constant temperature zone length: 600 mm (if three zones are in the same temperature within +/- 5°C)
- Cross-section Temperature tolerance +/- 5°C
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Working temperature
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- Max heating temperature: 1200°C
- Max heating & cooling rate: 10°C/min
- SiC heating elements, a total of 36 pcs
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Temperature control
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Laptop, software (Optional)
 
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- Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
- Labview Based Temperature Control System (EQ-MTS01) is available to enable the user to edit temperature profiles, manage heat-treatment recipes, and record and plot data for MTI furnaces.
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Eurotherm Controllers (optional)
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- Temperature Accuracy: ± 0.1ºC
- One controller per heating zone
- 1 program of 8 or 24 segments per controller
- Alarm Relay: Form 'A' and Form ‘C’ built-in
- Digital Communications: RS485
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Fused quartz tube
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- 11"OD or 15" O.D quartz tube with 71" Length is selectable from product option
- High purity quartz tube, please click the bottom left picture to view.
- Warning: quartz tube is fragile, please handle it with care. The warranty does not cover the broken tube by use
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Vacuum sealing & Flange
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A pair of stainless steel vacuum sealing flanges (Hinged Type) and 4 pieces of high temp-resistance silicon O-ring are included in order to achieve the vacuum rate of 10^-2 torr via a heavy-duty mechanical pump.
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Left Side Flange: stainless steel needle valves, and 1/4" barbed hose fitting.
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- One 1/4" OD thermal couple insert port is built on the right flange for easy temperature calibration.
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Options
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The tube furnace should be calibrated regularly to maintain temperature accuracy and uniformity. We are providing a simple calibration kit for you to complete this job at an extra cost. The complete calibration kit includes
- You may consider ordering turbopump for hi-vacuum up to 10-5 torr ( click pic below right to order )
- 4'' ~ 8'' large size quartz boats
- We can make the furnace into a verticle upon request.
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Rated Voltage
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- Three Phase, 208V AC, 50/60 Hz 3 phase 380V is optional
- Max. 20KW (70A breaker required)
- AWG 6# Power cord is included (without plug)
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Product Dimension
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2000 L x 765W x 1130 H, mm
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Net weight
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300kg
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Shipping dimension
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85" x 40" x 70" |
Shipping weight
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1200 lbs
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Warranty
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- One-year limited warranty on electrical parts. ( Consumable parts such as processing tubes, o-rings, and quartz tubes are not covered by the warranty)
- You may order a replacement quartz tube at the link below
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| Operation Instructions |
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Note
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- Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bar
- Attention: A two-stage pressure regulator must be installed on a gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
- The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
- In order to obtain accurate temperature inside the tube furnace, calibration of temperature is required before use, please click here to learn
- How to set up a ceramic tube and vacuum flange for an MTI Tube furnace
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