• 1200C Max. Microwave Plasma Enhanced CVD (MPECVD) Furnace with 1''-2'' Quartz Tube - OTF-1200X-S-MPECVD
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1200C Max. Microwave Plasma Enhanced CVD (MPECVD) Furnace with 1''-2'' Quartz Tube - OTF-1200X-S-MPECVD

1200C Max. Microwave Plasma Enhanced CVD (MPECVD) Furnace with 1''-2'' Quartz Tube - OTF-1200X-S-MPECVD

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SKU: OTF-1200X-S1-MPECVD

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OTF-1200X-S-MPECVD is a single zone microwave plasma enhanced CVD tube furnace. The system consists of a 600W microwave plasma generator, 1" or 2" O.D. quartz tube furnace and an anti-corrosive digital vacuum gauge. Microwave plasma showed potentials and possibilities for low temperature CVD processing, providing another method for efficiently nanoparticles coating / nanotube growth. 

Suitable applications and advantages:
- Higher degrees of ionization and dissociation help reduces the activation energy and enhances the kinetics to initiate a chemical reaction.
- Commonly used for conformal growth of carbon nanotubes (CNTs), conductive carbon or dimond like film on supporting substrates or particles.
- Suitable for processing electrical static discharge sensitive devices. This is a benefit of higher electrical field frequency and shorter electrons travel distances. 

Specifications

  Split Tube Furnace


 
  • Input voltage: 110/220 VAC, single-phase. 50/60 Hz.
  • Input power: 1.2 kW.
  • Maximum working temperature: 1200 °C (< 60 min).
  • Continuously working temperature: 1100 °C.
  • Maximum heating rate: 10 °C /min.
  • 30 segments programmable precision digital temperature controller.
  • 8" (200 mm) heating zone.
  • Compatible with 1" or 2" O.D. quartz tube.
Temperature Controller
  • Proportional integral derivative (PID) control.
  • Built in temperature and thermocouple failure protection.
  • Default D89 BC communication port.
  • Temperature accuracy: ±1 °C.
  • Heating elements: Fe-Cr-Al alloy doped by Mo.
  • RS485 Communications Port.
    • Advanced Temperature Control (Optional)
    • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit. 
    • You may upgrade the temperature controller to the Eurotherm 3204 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3204 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3204 temperature controller.            
Optional Tube Sizes
  • 1“ quartz tube: 25 × 1000 mm (O.D. × L).
  • 2“ quartz tube: 50 × 1000 mm (O.D. × L).
           Contact us for other optional tube sizes.
 Microwave Generator
  • Input voltage: 110 VAC, single-phase.
  • Input power: 600 W (Optional: 1200W, 2100W and 3500W microwave generators are available upon request, additional cost will be applied)
  • Frequency:  2.45GHz
  • Continuously working time: 30 mins.
  • Air cooling.
  • Equipped with an aluminum protective shield and an AC fan to minimize the microwave leak.
Pressure Sensor
Vacuum Pump
  • Working voltage: 110 VAC/60 Hz or 220 VAC 50/60 Hz, single phase.
  • Working power: 375 W.
  • 156 L/min rotary vane vacuum pump.
  • Vacuum capability: 10 ^ -3 Torr.
Product Dimensions
  • Product dimension: 1200 × 500 × 600 mm.
  • Furnace: 340 × 300 × 400 mm.
  • Microwave generator: 360 × 300 × 600 mm.
Warranty 
 One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
Laptop & software (Optional)
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) 
  • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipes, record and plot data for MTI furnaces.
  •     


Compliance

  • CE Certified
  • NRTL certification is available upon request at the extra cost.
             
Warning

Click here to learn the installation of a gas regulator
  • The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum pressures may only be safely used up to 1000°C
  • MTI reserves the right to modify PECVD design at  any time without notice but promise that quality will meet the specifications above
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