Dual Zone Split Tube furnace
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- Max 1100ºC for continuous heating
- Two programmable precision digital temperature controllers with 30 segments.
- Two separate controlled Heating Zones
- 200mm length for each heating zone
- 400mm total in heating length
- 250mm constant central temperature heating area if both zones were heated at the same temperature
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500ºC max temperature difference between two zones with thermal blocks in between
- Input power: 208 – 240V AC input, a single phase at max. 4KW
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Plasma RF Power Supply
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- Output Power: 5 -300W adjustable with ± 1% stability.
- RF frequency: 13.56 MHz ±0.005% stability.
- Reflection Power: 200W max.
- Matching: Automatic
- RF Output Port: 50 Ω, N-type, female
- Noise: <50 dB.
- Cooling: Air cooling.
- Power: 208-240VAC, Single Phase, 50/60Hz
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Pre-heating furnace
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- Small tube furnace with 200mm length single heating zone
- Max. temperature: 1100ºC
- 30 segment programmable temperature control
- The vapor goes through the heater first before getting in the RF Plasma generator.
- It can put solid material in the heater for evaporation and mixing with the vapor phase.
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Quartz Tube: 50mm OD x 44mm ID x 2200 mm L ( 80mm OD tube is available at extra cost
- Vacuum flange: included
 
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Anti-corrosive Pressure Gauge
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- 3.8x10-5 to 1125 Torr measurement range
- Anti-corrosive, gas-type independent
- High accuracy and reproducibility at the atmosphere for reliable atmospheric pressure detection
- Fast atmospheric detection eliminates waiting time and shortens the process cycle
- Easy to exchange plug & play sensor element
- Click the picture to view detailed spec.
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Vacuum Pump Station and Valves
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Sliding mechanism
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- Sliding rail and screws are built into the bottom furnace, which can move from one side to another as a program to achieve faster heating or cooling.
- Sliding speed is adjustable from 0-70 mm/s
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Heating & Cooling Rates
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RS485 port and software are installed and allow remote control temperature profile by PC (not included, customer can order one from here)
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To achieve Max. heating rate, the user must preheat the furnace to the desired temperature, then slide the furnace to the sample zone of the tube
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To achieve the Max. cooling rate, push the heated furnace from the hot zone to the cold zone
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Heating Rate:
15°C/sec (RT - 150°C);
10°C/sec (150°C - 250°C);
7°C/sec (250°C - 350°C);
4°C/sec (350°C - 500°C);
3°C/sec (350°C - 550°C);
2°C/sec (550°C - 650°C);
1°C/sec (650°C - 800°C);
0.5°C/sec (800°C - 1000°C);
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Cooling Rate:
15°C/sec (1000 - 950°C);
10°C/sec (950°C - 900°C);
7°C/sec (900°C - 850°C);
4°C/sec (850°C - 750°C);
2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);
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Optional
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- Two to four precision mass flow meters (0.02% accuracy) with digital displays are available as options, which can replace the bottom case to control the gas flow rate automatically with the system. Please click the picture below to choose one for your budget.
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Click the picture below - left to order a bubbler or evaporator for CVD, and below right for the Constant temperature control module
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Overall Dimensions
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Warranty
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One-year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
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Laptop & software (Optional)
 
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- Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30-day free trial) for immediate use.
- Labview-Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profiles, manage heat-treatment recipes, and record and plot data for MTI furnaces.
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Compliance
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- CE Certified
- NRTL (UL61010) or CSA certification is available upon request at extra cost.
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