OTF-1200X-80-F3LV-PTFE is a splittable single zone tube furnace with 80mm diameter quartz tube, mechanical vacuum pump and three channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-3 types of gases for CVD or diffusion. This furnace system features a PTFE gas system set to provide the anti-corrosive properties beyond stainless steel. The includes an anti-corrosive gauge, a vacuum pump with a cold trap, and the PTFE system. (Gas mixer and flange)
SPECIFICATIONS
Furnace Construction
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- Double layer steel casing with air cooling.
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Built-in thermostat automatically runs the cooling system when the case temp. > 55°C.
- Anti-corrosive gauge to enable vacuum measurements with aggressive gases.
- Vacuum pump with cold trap prevents aggressive gases reaching the pump.
- PTFE gas mixer and flange reduce aggressive gas contact to the susceptible surface.
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Power Consumption |
2.5 KW |
Input Voltage |
AC 208-240V Single Phase, 50 or 60 Hz |
Maximum Temperature |
1200 °C |
Continuous workingTemperature |
1100 °C |
Maximum Heating Rate |
<= 20 oC /min |
Heating Zone Length |
400 mm |
Constant Temperature Zone |
150mm (+/-1°C) |
Temperature Accuracy |
+/- 1°C |
| Heating Elements |
Fe-Cr-Al Alloy doped by Mo |
Temperature Controllers
 
 
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- PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
- 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
- Please click here to learn why SCR is more accurate than SSC (Solid state relay).
- Built in PID Auto-Tune function with overheating & broken thermocouple protection.
- Over temperature protection and alarm allows for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
- RS485 Communications Port.
- Advanced Temperature Control (Optional)
- MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit.
- You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller.
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Tube Size and Materials |
Quartz tube: OD: 80mm x ID: 75 mm x Length: 1000 mm |
Digital Vacuum Gauge 
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- Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases.
- Gauge is installed on the vacuum flange (right side) of the tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
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Vacuum Sealing Flanges
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Vacuum Pump
 
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156 L/m Double-Stage Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10E-4 torr.
- Stainless steel hose tube is included for connecting to tube furnace.
- A cold trap is included to capture corrosive material.
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Flow Meter & Pressure Meter
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Dimensions |
- Furnace: 550 x 380 x 520 mm
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Bottom Mobile case: 600 x 600 x 650 mm
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Net Weight |
~ 70 kg |
Shipping weight |
350 lbs |
Shipping Dimensions |
Two cases in one pallet: 45"x45"x35" /case |
Warranty |
One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below). |
Compliance |
- CE Certified
- NRTL or CSA certification is available upon request at the extra cost
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Application Notes
Click here to learn the installation of a gas regulator
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Operation Instructions |
  
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