GSL-1700X-60-III-F3LV is a three zones tube furnace with 60mm Dia. alumina tube, mechanical vacuum pump, and three channels gas flowing system, which can heat the sample to 1700°C and achieve vacuum degree up to 5x10^-2 torr and mix 1- 3 types of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.
SPECIFICATIONS
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Furnace Structure
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Double-layer steel casing with air cooling. Two cooling fans inside to keep the temperature of the outside case < 55oC. High-purity fibrous alumina insulation for Max, energy saving. Three independent heating zone via three precision temperature controllers. Click the picture on the left to review the detailed specification |
Thermal Block Placement
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Power Consumption |
10 KW |
Input Voltage |
AC 208-240V Single Phase, 50/60 Hz (75A air breaker required) |
Heating Zone |
Three zones: total 25" (630 mm) heating zone (including two refractory separators)
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Zone 1: 7.5" (190 mm) heated by 4 pcs U type SiC
- Working temperature 800 - 1400°C
- Heating rate: 10°C/min
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Zone 2: 10" (250 mm) heated by 6 pcs U type MoSi2
- Working temperature 800 - 1700°C
- Max. Heating rate: 5°C/min
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Zone 3: 7.5" (190 mm) heated by 4 pcs U type SiC
- Working temperature 800 - 1400°C
- Max. Heating rate: 10°C/min
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- 99.8% purity Alumina Tube
- 2-3/8" ( 60mm) O.D.x 2-1/8"I.D. (54mm) x 48" (1200mm) Length
- 60 mm stainless steel vacuum sealing flange with valve and meter is included
- Two porous ceramic blocks are included for protecting flange from heating radiation
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Temperature Controller |
- Three precision temperature controllers to control three zones separately.
- PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
- 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
- Built-in overheating & broken thermocouple protection.
- Over temperature protection and alarm allows for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
- RS485 Communications Port.
- Optional:
- The furnace may be operated by PC by installing three control modules. Please order the MTS-02 control modules at an extra cost.
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If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
  
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Vacuum Gauge
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Vacuum Pump
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Three Channel Gas Mixing and Delivery System
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Three gas flow meters ( 4% accuracy FS) are installed inside the mobile case which is able to monitor gases flowing rate (three different kinds of gases in total) click the picture on the left to see detailed specs
1) Compact direct read flow meter, 10-100 cc/min.
2) Compact direct read flow meter, 16-160 cc/min.
3) Compact direct read flow meter, 25-250 cc/min.
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Power Cable & Plug
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- 10 feet length 8-3 AWG heavy duty UL approved power cable is included
Extra length cable can be ordered by clicking the picture on left The plug is not included, you can order from your local hardware store according to the female plug in your lab
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Dimensions |
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Net Weight |
150Kg (furnace) + 100Kg ( total 550lb) |
Shipping Weight |
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