• 1700C Tube Furnace with High Vacuum System (10^-4Torr) & (2-4 Ch optional) MFC Gas Mixer - GSL-1700X-4-HVC-LD
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1700C Tube Furnace with High Vacuum System (10^-4Torr) & (2-4 Ch optional) MFC Gas Mixer - GSL-1700X-4-HVC-LD

1700C Tube Furnace with High Vacuum System (10^-4Torr) & (2-4 Ch optional) MFC Gas Mixer - GSL-1700X-4-HVC-LD

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SKU: GSL1700XCHV

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GSL-1700X-4-HVC-UL is a diameter 60mm single-zone alumina tube furnace with a high vacuum pump system (up to 10-5 torr) and 2 channel precision digital Mass flow-controllers, which can control two types of gases for CVD or diffusion and work up to 1600ºC.

Specifications





GSL-1700X series tube furnace

 Casing
 Double-layer steel casing with air cooling.
Two cooling fans inside to keep case temperature < 55°C.
High purity Alumina refractory chamber
The vacuum and gas mixing system is located in the bottom Mobile cart with 4 wheels.
Vacuum flange, gauge, valves, pipe, and high vacuum pump are included for immediate use.
Processing Tube
 Material: High Purity Alumina
One 60mm O.D. processing alumina tube (EQ-TA-60D-M1000) is included with the furnace.
The furnace can be also custom made to fit the 50mm or 80mm O.D. processing alumina tube at an extra cost, please contact us for more information. 

Thermal Block Placement
Power
 AC 208-240V Single phase, 50/60Hz
6KW
Heating Element
 8 pcs 1800°C grade MoSi2 heating element
Working Temp.
 Max. Heating Temp.: 1650°C
Continuous Working Temp.: 1600°C
Heat-up Rate
 <=5°C/min
Heating Zone Length
 Heating zone length: 457 mm (18")
Constant Temperature Zone length: 150 mm (6")(+/-1°C)
Temp. Control
 PID automatic control via current limiting phase angle fired the resistor with 30 steps programmable segments.
Temperature accuracy:±1°C
Thermocouple: B type built inside the furnace
RS485 Communications Port.
  • Advanced Temperature Control (Optional)
  • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for detailed information about the MTS02-Y software kit. 
  • You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB), and a software CD. Click the pic below to view the full spec of the Eurotherm 3504 temperature controller. 
            
Vacuum Seal
 One pair of stainless steel vacuum flange with:
- one mechanical vacuum gauge
- two needle valves
- one KF-25 connector and KF-25 to KF-40 adapter for the high vacuum station.
- one 1/4" Swagelok tube connector
Dimension
 550 x 380 x 520
High Vacuum Station
 Power
 100~110W
Rated Voltage
 AC 208-240V Single Phase, 50/60Hz
Dimension
 600(L) x 600(W) x 700(H), mm
Structure
 Mobile cart size:  600 (L) x 600 (W) x 700(H), mm
Max. Loading:       600 Lbs on top
Molecular pump control Panel:   LCD digital
Inside:   Pfeiffer vacuum pump  made in Germany
A vacuum sensor is included
Control Panel
 One button operation - the diaphragm pump and the turbopump will start after pressing "start" button.
System-controlled spinning speed - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber.
Self-protection - the system will protect the pump from damage by overheating and over-current if the leaking rate of the reaction chamber is too high to achieve high vacuum.
LCD screen - double lines parameters checking interface make the working easier to be handled.
Self-testing
 Spinning up Error report
 Voltmeter
  Full speed
Volume Flow Rate
 Nitrogen   N2     33 L/s
Helium      He     39 L/s   (2340L/minute)
Hydrogen H2   32 L/s
Working Range From 1000 mbar to <1E-7 mbar
Ultimate Pressure <1E-8 mbar (without any leaking )
Mass Flow Gas Control
EQ-GSL-LCD

 		Structure
Made of 316 stainless steel valve
Gas mixing tank: Φ80X120mm 
600mm(L) x 745mm(W) x 700mm(H)
6" color touch screen control panel to make parameter setting at easy.
Touchscreen Control and PC remote switchable.
The flow rate control range and a number of gas routes are available for customization. Please contact us for detailed information.
Power 23W per channel
Rated Voltage
  AC 220V/50Hz Single phase
Gas routes
 Please select the number of gas routes in the optional bar to update the price
Application Notes
Warranty One-year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacements at related products below.)
Compliance
  • CE Certified
  • NRTL(UL61010) or CSA certification is available at extra cost. 
Shipping Dimensions
 Two cases in one plastic pallet: 45x45x35/case
Warnings

Click here to learn about the installation of a gas regulator.
  • The tube furnaces with alumina tubes are designed for use under vacuum and low pressure < 0.02 MPa/ 3 PSI 
  • Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Never heat the furnace while the gas release valve is closed and a positive pressure condition exists within the furnace chamber. The pressure gauge must be used to closely monitor the chamber condition at all times during the heating process; please open the gas release valve immediately once the chamber pressure has reached over 3 PSI to prevent unforeseeable damages.
  • The flow rate for gases should be limited to < 200 SCCM ( or 200ml/min )
  • Vacuum pressures may only be safely used up to 1500°C
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