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Furnace structure
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Double-layer steel case with two cooling fans which ensure low surface temperature;
Energy-saving high purity fibrous alumina insulation;
Two fibrous ceramic tube blocks are included for blocking heat radiation from inside of the tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating). Quartz block (Optional) is ideal for more cleanness and higher achievable vacuum. |
Rated voltage
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AC 208-240V Single Phase, 50/60 Hz (40A breaker required; Powder cord is included without plug)
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Power consumption
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6 KW Max.
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Heating elements
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Fe-Cr-Al Alloy doped by Mo
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Heating zone length
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Fused Quartz Tube(Please choose from product option)
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Model: OTF-1200X-III-SHG-80-UL
80 O.D x 72 I.D x 1200 L (mm)
2" wafer Max. |
Model: OTF-1200X-III-SHG-4-UL
101 O.D x 92 I.D x 1200 L (mm)
3" wafer Max. |
Model: OTF-1200X-III-SHG-5-UL
130 O.D x 122 I.D x 1200 L (mm)
4" wafer Max. |
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Warning The tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.12 Mpa (absolute pressure)
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Heating temperature
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- Max. Heating Temperature: 1200°C at flowing gas
- Continuous Heating Temperature: 1100°C at flowing gas
- Max. The heating temperature at Vaccum 1000°C
- Max. Heating Rate: 20°C/min
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Temperature Controllers
 
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- PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
- Built-in overheating & broken thermocouple protection.
- Over-temperature protection and alarm allow for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
- Three K-type thermocouples (one for each zone).
- RS485 Communications Port.
- Optional:
- The furnace may be operated by a PC by installing a control module. Please order an MTS-02 control module at extra cost.
- The new version of the PC module is now compatible with Lab View 05/08/2014
- If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you order a computer laptop from us to avoid software installation problems. For more information please click here.
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European Temperature Controllers (optional upgrade)
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- 1 heating channel
- 1 programs of 8 or 24 segment
- Alarm Relay: Form 'A' and Form ‘C’ built-in
- Digital Communications: RS485
- Temperature Accuracy: ± 0.1ºC
- Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
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Vacuum Flange and Gauge
 
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Hinged type flanges are installed on both ends for easy sample loading/unloading; KF25D adapter installed on left flange with a precision digital vacuum gauge; SS needle valve with 1/4" pipe connector installed on right flange; - Max. vacuum pressure can reach 10^-2 torr by mechanical pump and 10^-5 torr by the molecular pump;
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Optional: you may choose our molecular vacuum pump station for higher vacuum
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| Optional Part |
In order to build a complete CVD system, you may need a bubbler or gas delivery system, and a quartz wafer Carrier. . Please click the picture below to choose:
   
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Dimensions
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750mm(L) x 525mm(W) x 670mm(H) |
Net Weight
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70 kg
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Warranty
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One-year limited warranty with lifetime support (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacements at related products below.)
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| Laptop, software & WiFi Control(Optional) |
- Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial)
- Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profile, manage heat-treatment recipes, record and plot data for MTI furnaces.
- A wireless remote control provides up to 300 meters of operating range.
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Compliance
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- CE certified
- NRTL or CSA certification is available upon request at extra cost
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Shipping dimensions
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65"(L) x 45"(W) x 35"(H)
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Shipping weight
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340lbs
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Application Notes
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Pls click the picture below to learn how to create a temperature gradient (pic.1)
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Order a temperature calibration kit by clicking pic.2.
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Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure below 3PSI for safe operation. Click here to learn the installation of a gas regulator. (pic.3)
- We suggest accommodating an FH-60 fume hood with this furnace (pic.4)
 pic.1  pic.2  |
