• 800°C Max. CSS and RTP Furnace With Rotating Holder for 5x5" Wafer- RTP-II-5-R
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800°C Max. CSS and RTP Furnace With Rotating Holder for 5x5" Wafer- RTP-II-5-R

800°C Max. CSS and RTP Furnace With Rotating Holder for 5x5" Wafer- RTP-II-5-R

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SKU: RTP-II-5-R

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RTP-II-5-R is an advanced rapid thermal processing furnace, which is designed for CSS (Close Spaced Sublimation) film coating up to 5" circular or square wafer samples at the working temperature of 800°C Max. The furnace is heated by two groups of halogen heaters (Top and Bottom) separately with max. 10ºC/s heating rate. The top sample holder is rotatable to achieve uniformity coating. It is an excellent tool to research new generation thin films for solar cells, such as CdTe, Sulfide, and Perovskite solar cells. 

SPECIFICATIONS:
Furnace structure 
  • Furnace, two temperature controllers, and two-channel gas flowmeters are integrated into a mobile aluminum alloy frame.
  • The chamber is made of high purity fused quartz tube with the dimension of 11" OD/10.8" ID x 9" H.
  • The vacuum flanges are made of Stainless Steel 316 and lifting by an electric motor.
  • Two 5"x5"  IR heating plates and the spacing are adjustable.
  • The top sample holder is rotatable at a speed of 0 - 7 RPM.
Vacuum Flanges

 
  • Top Flange with one KFD-25 vacuum port and one gas outlet (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily.
  • The bottom flange has one KFD-25 vacuum port with one gas inlet (1/4" pipe required) with needle valves.
  • The flange is sealed by double silicone o-rings and can achieve max. the vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by a molecular pump (vacuum pump is not included, please order separately).
  • One digital vacuum gauge is installed on the top flange.  
  • Precision anti-corrosion digital vacuum gauge is in standard package(Since 2016.03.24).
             
Heater and Sample Holder
  • Two independently controlled heaters with a manually adjustable gap from 2 - 30 mm. 
  • 20 pcs Halogen lamps are used as the heating element for rapid thermal processing.
  • Heaters are made of stainless steel with a water cold jacket to reduce heat radiation and are capable of fast cooling.
  • 5" Dia. the circular wafer holder is built into the top heater for holding the substrate.
  • One set of high thermal-conductive AlN plates (5" Dia. x 0.5mm Thick) are included (place on the back of the substrate to make it heat uniformly).
  • A 58L/min circulating water chiller is included for saving water source ( click the picture below to see detailed specs).
  • The top sample holder is rotatable at an adjustable speed  0 - 7 RPM
                          

Temperature Controller
  • Two precision digital temperature controllers with 30 segments programmable offer independent controlling of top and bottom heaters.
  • Each controller has a PID autotune function to protect heaters from overshooting and an alarm function to prevent overheating from damaging the thermal couples.
  • PC communication interface & software are installed for (click the picture below for details) recording temperature profile shown as below.
  •               


Working Temperature
  • The maximum temperature for each heater: ≤ 800ºC.
  • The maximum temperature difference between the two heaters: ≤ 300ºC depends on the spacing between the two heaters:
    • Spacing 30mm       Max. temp difference:  315ºC @ heating bottom only
Heating & Cooling Rate
  • Heating: < 8ºC/s ( heating single heater only )
  • Cooling: < 10ºC/s (600 - 100ºC) Max.
Thermal Couple   Two K-type thermal couples are installed on top and bottom heaters separately.
Working Voltage   208 - 240VAC, single-phase, 50A air breaker
Power Requirement   10 KW  total 
Dimensions

 ( click pic to see dimension )
Shipping Weight & Dimension
  • Two pallets: 525 lbs   and 48" x 40" x 87" and 165 lbs with 39x31x29" dimension




Optional
  • One vacuum pump is required. Please order separately by clicking the first picture from the left below. The vacuum level can reach ≤ 10E-2 torr by a mechanical pump. 
  • If using corrosive gas, please use a cold trap or anti-corrosive dry pump as in pictures 2-3 at extra cost.
  • You may choose a digital MFC gas delivery system by clicking the first picture from the right below.
                             
Warranty One year limited with lifetime support ( Consumable parts such as quartz tubes and heating lamps are not covered by the warranty).
Compliance
  • CE Certified
  • UL / MET / CSA Certification is available upon request, additional charges will apply.
Operation Instructions           

Application Notes & Warnings

     
  • The tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa. Vacuum pressures may only be safely used up to 1000°C. The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube.
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • The foot-stand of this furnace is designed for short-distance hauling on the even surface (without pits or bumps) only.
References
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