VTC-200P is Anti-Corrosion Spin Coater made of  Polypropylene (PP) material, which can be used for active acidic or alkali solution, especially suitable for use inside glovebox under Ar gas.   4'' dia. vacuum chuck is included for coating wafer up to  6".  The digital control box is separated from a spin coater which allows you to operate in the remote location. The spinning speed is variable from 500-8000 rpm with six programmable segments. The package includes the oilless vacuum pump and a 20ml syringe for immediate use.  This spin coater can be used under Argon atmosphere inside the glovebox

SPECIFICATIONS:

Structure	Case and spin disk made of Polypropylene (PP) to resist most of the corrosive solutions. The digital control box is separated from the spin coater. One filter is included in the standard package. It is used to connect the pump and coater for preventing wastewater from flowing into the pump. One oil-less vacuum pump is included in the standard package; please click here for specification details.
Input Power	Default 220VAC, 50/60Hz,  single phase, 1000W Max. 110V is available in optional bar ( with 1500W transformer ) A power socket on the back of the Digital control box is used to supply power to the vacuum pump. (The output voltage of this power outlet depends on the input voltage of the spin coater, e.g. if the spin coater is plugged into AC 110V, this power socket will supply AC 110V.)
Chamber  & Vacuum Chuck	Chamber diameter:  150 mm The vacuum chuck:  Φ100mm, which can hold substrate 4" to 6" Dia. ( Pic. 1) If your sample < 4", please order a small chuck at extra cost ( click Pic. 2 ) You may use blue tape for the sample with irregular shape (Pic. 3)                                              Pic. 1              Pic. 2                 Pic. 3
Vacuum Pump	One 120L/min Oilless Vacuum Pump is included in the standard package, please click the picture below for specification details. (Pic.1) To put the pump inside Ar glovebox, please use a quiet 24vdc dry pump (Pic. 2 )          Pic. 1                           Pic. 2
Spin Speed	Digital control panel with six programmable segments of different spin times and speeds Up to 12 Programs/Recipes can be saved and recalled at any time. 6 Segments can be set for each program. Max speed ramping/lowering between each segment is 2000 rpm. Maximum programmable spin time 6*60s = 360s  500 - 6000 RPM adjustable spinning speed  at each segment 10000 RPM is available upon request at the extra cost. Special DC motor which can use run under Ar gas and inert gas atmosphere inside a glove box.
Liquid Injecting	20mL syringe is used to contain the coating material (Click Pic 1)  - Pic 1
Optional	You may choose Precision Electronic Single Channel Pipette: 20 - 200uL for better coating (Pic. 1 ) Using a plasma cleaner to treat the substrate surface before the coating can improve film quality (Pic. 2) You may consider our new product: Heatable syringe (Click Pic 3)                                                                                Pic.1                      Pic.2                          Pic.3 Heating cover with a digital temperature controller up to 120 is available upon request at extra cost, which allows sample drying in-situ during and after coating (Click Pic 4 & 5). Please confirm 110V or 220V version when you order. Vacuumable spin coater with digital gauge is available ( Pic. 6) If you need to place the coater into a glovebox (Pic. 7), Please let us know in advance.  The KF40 feedthrough is needed to connect the power cable of the control box and vacuum pump to the outside glovebox at the extra cost. (Pic.8)          Pic.4                         Pic.5                       Pic.6          Pic.7                        pic.8
Motor	24VDC, Brushless,  200W max.:
Product Dimensions (Click the Pictures  for details)           2D Drawing	Spin Coater:                      250mm(Φ) x 560mm(H) with cap opened Spin Coater:                      250mm(Φ) x 560mm(H) with Syringe installed Spin Coater:                      250mm(Φ) x 560mm(L) x 560mm(H) from side view Digital controller:               380mm(L) x330mm(W) x150mm(H) Temperature Controller  230mm L x 260mm W x 120 mm H Vacuum Pump:                   290 L x 210 W x 213 H (mm)
Net Weight	25 kg
Compliance	CE Certified
Warranty	One year limited with lifetime support Rusting and damage due to improper storage condition or maintenance are not covered by warranty
Operation Manual & Video
Application Notes	Please clicks here to review an article on "Spin Coater Theory and Processing." To achieve better coating quality, please consider cleaning substrates by plasma cleaner before coating The EQ-OFDP-2 is a tiny silent powerful diaphragm pump made in Germany and provides an excellent vacuum performance; now it's only $1455 for you to have this pump. You may consider placing the spin coater into a small glovebox and coat under an inert gas atmosphere Cleaning instruction for the spin coaters.