Name: Compact Atmosphere Controlled RTP Furnace with 4" ID Quartz Tube up to 1100°C - OTF-1200X-4-RTP
Brand: KMT
Price: 14986.0 USD
Availability: InStock

1 1

Compact Atmosphere Controlled RTP Furnace with 4" ID Quartz Tube up to 1100°C - OTF-1200X-4-RTP

Low stock: 3 left

Price: RFQ

SKU: : \

Choose your Variant:

Quantity:

Note

View full details

Please view "Grains and grain boundaries in single-layer graphene atomic patchwork quilts" published by NATURE 09718, Jan 5, 2011, in which an MTI RTP furnace was used.
Please view "Improved control in the elimination of white impurities on graphene by chemical vapor deposition (CVD)" published by AIP Advances8, 125325 (2018), in which an MTI RTP furnace was used.
Please view "Thin-film Sb2Se3 photovoltaics with oriented one-dimensional ribbons and benign grain boundaries" published by NATURE Photonics, in which an MTI tube furnace was used for Thin-film Sb2Se3 photovoltaics Rapid Thermal Evaporation processing.

OTF-1200X-RTP-4 is a compact rapid thermal processing tube furnace with a 4" I.D. processing quartz tube and vacuum flanges. It is designed for annealing semiconductor wafers or solar cells with diameters up to 3". OTF-1200X-4-RTP is heated by 8 units of 1KW halogen light with a max. the heating rate of 50ºC/second. 30 segment precision temperature controller with +/-1ºC accuracy is built into the furnace to allow for heating, dwelling, and cooling at various steps. RS485 port and control software are included to make monitoring the temperature profile via PC while simultaneously running furnace possible. This furnace also can be modified into an RTE, CSS or HPCVD furnace ( see below application note )

SPECIFICATIONS

Furnace Structure	Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C. High purity fibrous alumina insulation for maximum energy saving. Split cover with Interlock protection, cut the power if lid open during furnace heating process.
Power Input	208-240 AC, 50/60 Hz single phase, 9 KW Max. (60A breaker required)
Heating Elements	8 pcs 1Kw Halogen light tube, ( Dia. =10mm, L=300mm, Heated Length =200mm) Standard working life: 2000 hrs. ( depends on heating rate ) The Halogen light tube is consumable. Please click picture left to order a spare one
Heating Zone	12" length with 4" constant temperature zone within +/-5ºC uniformity
Working Temperature	1100ºC Max. for < 10 minutes 1000ºC Max. for < 20 minutes (Note: if running longer time, furnace case will > 100°C, must use fan to cool the furnace case from outside) 800ºC Max. for < 120 minutes 600ºC Max. for Continuous
Max. Heating Rate	50ºC/sec
Cooling Rate	Max. Cooling: 60ºC/min (Under vacuum: 200 m-torr), 117ºC/min (under atmospheric pressure) Lowest Cooling: 10 ºC / minute
Thermocouple	K type, the head of the thermocouple touches the Aluminum Nitride sample holder from underneath
Temperature Controller	FA-YD808P-AG temperature controller is included. Proportional–integral–derivative control (PID control) and auto-tune function 30 segments programmed with ramping, cooling and dwelling steps Built-in over-temperature alarm and thermocouple failure alarm +/- 1 ºC temperature control accuracy Default DB9 PC communication port
Temperature controller (optional)	MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for detailed information about the MTS02-Y software kit. You may upgrade the temperature controller to the Eurotherm 32H8 Temperature Controller which includes a communication cable (RS485 - USB) and a software CD. Click the pic above to view the full spec of the Eurotherm 32H8 temperature controller.
Quartz Tube & Sample Holder	Quart Tube Size: 4.33" O.D x 4.05" I.D x 16.2" Length. ( click pic-1 to order replacement ) One 3" Diameter AlN sample holder for annealing samples up to 3" Dia is included. AlN has a very high thermal conductivity which provides the best temperature uniformity in the sample area. The sample holder is removable from the flange for using the RTP furnace for other purposes Optional: 3'' O.D Thick Graphite Substrate can be used as an alternative to the AIN plate. (pls click pic-3 to order) Optional: Graphite Crucible:87 mm OD x 71 mm ID x 12 mm Height with lid is designed for 3" sample holder, can also be modified into an RTE, CSS or HPCVD furnace with a graphite crucible coated with SiC.
Vacuum Flange	KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves, and a water-cooling jacket. It only requires water cooling in long-running times at temperatures > 600^oC. Circulating water rate: 0.5 m³ /hr. The slide-out flange provides an easier way of loading, unloading the samples and other specific processes needed. Insert-able thermal-couple for accurate measurement.
Vacuum Pump (optional)	EQ-FYP vacuum pump is recommended for this furnace. The ultimate vacuum pressure in this system can be 10^-3 torr. Vacuum bellows and clamps are included in this package. Click here for the spec of EQ-FYP vacuum pump. Click here to view other models of pump and package.
Water Cooling (optional)	Cooling water is required. Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI. We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water. Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise, O-ring may melt.
Flow-meter	One flow meter is installed on the front panel for adjusting gas flow from 16 - 160 ml/min
Vacuum Gauge	A digital vacuum gauge with a measurement range from 10^-4 to 1000 Torr is installed on the furnace.
Vacuum Pressure & Gas Fitting	Pressure can reach 50 more by using a mechanical vacuum pump with KF25 adapter Pressure can reach 10^-4torr by the molecular pump with KF25 adapter
Dimensions	Flange closed: 1350mm(L) x 330mm(W) x 590mm(H) Flange opened: 1350mm(L) x 520mm(W) x 740mm(H)
Net Weight	70 kg (150 lbs)
Shipping Weight & Dimensions	220 lbs 47"x39"x40"
Warranty	One year limited manufacturer warranty with lifetime support (Consumable parts such as processing tubes, o-rings and halogen lamps are not covered by the warranty, please order replacements at related products below).