Compact Spin Coater (8K rpm, 4" wafer Max.) w/ 3 Vacuum Chuck - VTC-100A
Compact Spin Coater (8K rpm, 4" wafer Max.) w/ 3 Vacuum Chuck - VTC-100A
Low stock: 1 left
Regular price
$2,998.00 USD
Regular price
Sale price
$2,998.00 USD
Unit price
per
SKU: : \VTC100A-mach
VTC-100A is a compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 4". The spinning speed is variable from 500-8000 rpm with two programmable segments. The package comes included with complete accessories for immediate use.
SPECIFICATIONS:
Structure |
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Chamber & Vacuum Chuck |
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Vacuum Pump |
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Spin Speed & Time |
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Liquid Injecting |
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Input Voltage |
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Motor Power | 24V DC motor with 150W Max. |
Product Dimensions |
13''(L) x 10''(W) x 8.5''(H) |
Net Weight | 15 kg (33 lbs) |
Compliance |
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Warranty |
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Operation Video |
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Warnings |
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Shipping Dimensions | 40"(L) x 28"(W) x 24"(H) |
Shipping Weight | 85 lbs |
STANDARD PACKAGE: | ||
Item # | Description | Qty |
1 | VTC-100A Desktop Spin Coater | 1 |
2 | 4" Vacuum Chuck (pre-installed on the machine) | 1 |
3 | 2" Vacuum Chuck | 1 |
4 | 1" Vacuum Chuck | 1 |
5 | Plastic Glass Cover for operation safety (pre-installed on the machine) | 1 |
6 | 20mL Syringe for dropping coating solvent on the plate | 1 |
7 | Hose for connecting the vacuum pump | 1 |
8 | Drain Hose for water outlet | 1 |
9 | Blue Adhesive Tape (6" W x 24" L) |
1 |
Optional Parts | ||
Option | Oil-less Vacuum Pump, AC 110V or 220V with Filter installed on the pump (connect to vacuum pipes to keep water from flowing into the pump) |
Option |
Option | Chuck O-ring For VTC200 OR VTC100 |
Option |
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Manufacturer Part Number: