• Dual Zone Quartz Tube Furnace (80mm Dia, 1200C Max) with 3-Ch Gas Mixer, Vacuum Pump, & Anti-Corrosive Vacuum Gauge - OTF-1200X-II-F3LV
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Dual Zone Quartz Tube Furnace (80mm Dia, 1200C Max) with 3-Ch Gas Mixer, Vacuum Pump, & Anti-Corrosive Vacuum Gauge - OTF-1200X-II-F3LV

Dual Zone Quartz Tube Furnace (80mm Dia, 1200C Max) with 3-Ch Gas Mixer, Vacuum Pump, & Anti-Corrosive Vacuum Gauge - OTF-1200X-II-F3LV

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SKU: OTF1200XIIF3LV80

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OTF-1200X-II-F3LV is a CE-certified and ready-to-pass UL/CSA certification Dual Zone Split Tube Furnace with an 80mm diameter quartz tube, mechanical vacuum pump, and three-channel gas-flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-3 types of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.

SPECIFICATIONS 


Furnace Construction
  • Double-layer steel casing with air cooling. 
  • The built-in thermostat automatically runs the cooling system when the case temp.  > 55°C.

Power Consumption

2.5 KW

Input Voltage

AC 208-240V Single Phase, 50 or 60 Hz 
Maximum Temperature 1200  °C
Continuous Working Temperature 1100  °C
Heating Zone Length Two Zones:  200 mm (8") for each zone and total 400 mm heating zone length


Constant Temperature Zone
  • If two zones are set at the same temperature, constant temperature zone is 10" (250 mm) long with a temperature discrepancy of +/- 1°C.
  • If using only one zone (center zone), constant temperature zone is 4.3" (110 mm) long with a temperature discrepancy of +/- 1°C.
Max. Heating Rate <= 20  °C /min (20 °C /min below 800°C; <5 °C /min over 1000°C)
Temperature Accuracy +/- 1°C
Heating Elements Fe-Cr-Al Alloy doped by Mo









Temperature Controllers
  • Two precision temperature controllers to control two zones separately.
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
  • Optional:  
    • The furnace may be operated by PC by installing two control modules. Please order the MTS-02 control modules at extra cost. 
    • The new version of the PC module is now compatible with Lab View 05/08/2014
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you order a computer laptop from us to avoid software installation problems. For more information please click here.
                  

Tube Size and Materials

Quartz Tube: 80 OD x 72 ID x 1000 L

Digital Vacuum Gauge 

Vacuum pressure gauges
                 

Vacuum Sealing Flanges
  • Two stainless steel flanges with KF25 port, vacuum gauge, and valves included.
  • Min. vacuum pressure achieved by a mechanical pump is 5.5 m-torr. (5.5x10^-3 torr). The pressure can reach 10^-5 torr using mechanical + molecular pumps.
  • The leaking rate is < 5 m-torr/min and stable vacuum pressure after 24 hours is < 2 torr.
  • Click the picture below to get details of both charts and data measured by CE certified vacuum meter: 

    Note: For the 24-hour curve display the time segment through 08:00:00~21:10:00 in X-axis is skipped over in the chart; therefore, a steep variance is present.
    Oxygen Monitoring

    An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation at extra cost. Please click the picture below to learn more:
            

    Vacuum pump

    156 L/m Double Stage Rotary Vane Vacuum Pump with Exhaust Filter (220V single phase) and stainless steel hose tube are included for connecting to the tube furnace. Max. archivable vacuum pressure is 10^-2 torr.


    Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with a motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr.


    Gas Mixing Control Station

    		           1) Compact direct read flow meter, 10-100 cc/min.
              2) Compact direct read flow meter, 16-160 cc/min.
              3) Compact direct read flow meter, 25-250 cc/min.
    • One pressure meter is installed inside the mobile cart which is able to monitor the pressure of the mixing tank.
    Valves Four stainless steel valves are installed in the side panel of a mobile cart to control the mixing of three inlet gases separately


    Dimensions
    • Furnace: 550 x 380 x 520 mm 
    • Bottom Mobile case: 600 x 600 x 597 mm Each

     Net Weight

    ~ 60 kg 

    Shipping Weight

    750 lbs

    Shipping Dimensions

    Three Pallets: 48"x40"x45" each

    Warranty

    One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

    Laptop, software & WiFi Control (Optional)

    • Brand new laptop with Microsoft Windows 11 and Microsoft Office 2013 (3
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    Manufacturer Part Number: