Quartz Boat for Diffusion of Wafer Processing (1"- 12" dia , 25/boat) with different size available - EQ-QB-Series
Quartz Boat for Diffusion of Wafer Processing (1"- 12" dia , 25/boat) with different size available - EQ-QB-Series
Low stock: 6 left
Regular price
$249.00 USD
Regular price
Sale price
$249.00 USD
Unit price
per
SKU: : \QB2025
Features:
- Wafer boats are made of ultra-high purity quart (4N purity) for diffusion, oxidation, and annealing up to 1200oC.
- Each boat can only carry one size of wafers up to 25 pieces from 1" to 12" diameter by 0.5 mm thick separately.
- Please choose the correct size of the wafer from the product option bar.
Size | Can fit into MTI furnaces | ||||
1" |
OTF-1200X-S50 tube furnace (2" tube furnace) |
1" wafer with a quartz boat |
Mechanical Drawing |
1" wafer with quartz boat can be placed into 2" tube |
Place 1" wafer in the center of the furnace |
2" | OTF1200-3 tube furnace (3" tube furnace) |
2" wafer with a quartz boat |
2" Quartz boat cross-section drawing (mm) - Length 180 mm |
2" wafer with quartz boat can be placed into 3" tube |
Place 2" wafer in center of the furnace |
3" | OTF1200-4 tube furnace |
3" wafer with a quartz boat |
3" Quartz boat cross-section drawing (mm) - length 180 mm |
3" wafer with quartz boat can be placed into 4" tube |
Place 3" wafer in center of the furnace |
4" | OTF1200X5L tube furnace |
4" wafer with a quartz boat |
4" Quartz boat cross-section drawing (mm) - length 180 mm |
4" wafer with quartz boat can be placed into 5" tube |
Place 4" wafer in center of the furnace |
4" x 4" |
OTF-1200X-5L, VBF-1200X-H8, OTF-1100X-8.5 tube furnaces |
4" wafer with a quartz boat |
4" x 4" Square wafer with quartz boat can be placed into 8" tube | Place 4" wafer in center of the furnace |
|
6" |
GSL1100X-8.5-S-UL tube furnace, GSL1100X-8.5-III tube furnace, Compact Vacuum Chamber Furnace EQ-VBF-1200X |
The dimension of 6" quartz boat |
6" Quartz boat cross-section drawing (mm) - length 190 mm |
6" wafer with quartz boat can be placed into 7" tube |
The 6" quart boat can fit in VBF1200 Muffle Furnace |
8" | GSL1100X-11-III tube furnace |
The dimension of 8" quartz boat |
8" Quartz boat cross-section drawing (mm) - length 173 mm |
8" wafer with quartz boat can be placed into 8.5" tube |
Place 8" wafer in center of the furnace |
12" |
OTF-1100X-III |
The dimension of 12" quartz boat |
12" Quartz boat cross-section drawing (mm) - length 172 mm |
12" wafer with quartz boat can be placed into 15" tube |
Place 12" wafer in center of the furnace |
Inspect your delivery:
Please check the package for damages before accepting delivery.
Should damages found, please keep all packaging materials, take pictures, and report immediately to carrier/MTI.
No Warranty:
Kindly note this item is a consumable part, and not covered by warranty. Make sure to inspect for defect(s) thoroughly before use.
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