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Quartz Boat for Diffusion of Wafer Processing (1"- 12" dia , 25/boat) with different size available - EQ-QB-Series

Quartz Boat for Diffusion of Wafer Processing (1"- 12" dia , 25/boat) with different size available - EQ-QB-Series

Low stock: 6 left

Regular price $249.00 USD
Regular price Sale price $249.00 USD
Sale Email for Lead Time

SKU: : \QB2025

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Features:

  • Wafer boats are made of ultra-high purity quart (4N purity) for diffusion, oxidation, and annealing up to 1200oC.
  • Each boat can only carry one size of wafers up to 25 pieces from 1" to 12" diameter by 0.5 mm thick separately. 
  • Please choose the correct size of the wafer from the product option bar. 


Size Can fit into MTI furnaces
1" OTF-1200X-S50 tube furnace 
(2" tube furnace)

1" wafer with a quartz boat
 
Mechanical Drawing

1" wafer with quartz boat
can be placed into 2" tube

Place 1" wafer in the center of the furnace
2" OTF1200-3 tube furnace 
(3" tube furnace)

2" wafer with a quartz boat

2" Quartz boat cross-section drawing (mm) - Length 180 mm

2" wafer with quartz boat
can be placed into 3" tube

Place 2" wafer in center of the furnace
3" OTF1200-4 tube furnace
3" wafer with a quartz boat


3" Quartz boat cross-section drawing (mm) - length 180 mm

3" wafer with quartz boat can be placed into 4" tube

Place 3" wafer in center of the furnace
4" OTF1200X5L tube furnace
4" wafer with a quartz boat

4" Quartz boat cross-section drawing (mm) - length 180 mm

4" wafer with quartz boat can be placed into 5" tube

Place 4" wafer in center of the furnace
4" 
x
4"
OTF-1200X-5L
VBF-1200X-H8
OTF-1100X-8.5
tube furnaces


4" wafer with a quartz boat
4" x 4" Square wafer with quartz boat can be placed into 8" tube
Place 4" wafer in center of the furnace
6" GSL1100X-8.5-S-UL tube furnace
GSL1100X-8.5-III tube furnace,

Compact Vacuum Chamber Furnace EQ-VBF-1200X

The dimension of 6" quartz boat

6" Quartz boat cross-section drawing (mm) - length 190 mm

6" wafer with quartz boat can be placed into 7" tube

The 6" quart boat can fit in VBF1200 Muffle Furnace
8" GSL1100X-11-III tube furnace
The dimension of 8" quartz boat

8" Quartz boat cross-section drawing (mm) - length 173 mm

8" wafer with quartz boat can be placed into 8.5" tube

Place 8" wafer in center of the furnace
12"
OTF-1100X-III

The dimension of 12" quartz boat
 
12" Quartz boat cross-section drawing (mm) - length 172 mm

12" wafer with quartz boat can be placed into 15" tube

Place 12" wafer in center of the furnace


Inspect your delivery:
Please check the package for damages before accepting delivery.
Should damages found, please keep all packaging materials, take pictures, and report immediately to carrier/MTI.

No Warranty:
Kindly note this item is a consumable part, and not covered by warranty. Make sure to inspect for defect(s) thoroughly before use. 

Manufacturer Part Number: