AlN Template on saphhire is made by a Plasma Vapor Deposition of NanoColumns (PVDNC)-based method.  AlN template is a cost effective way to replace AlN single crystal substrate.

Specifications

• Aluminum Nitride Template:                       4'' diameter
•  Nominal AlN thickness:                             5000 nm +/- 10%
• Front Side Surface:                                                As-grown
• Back Side Surface:                                    Substrate as-received
• Edge Exclusion Area:                                 5 mm
• Macro Defect Density:                                <=5 cm^-2
• Sahhpire Substrate, Diameter:                    100 +/- 0.2 mm
• Sapphire Substrate, Orientation:                 C-plane off 0.20 +/- 0.1 deg to M-plane
• Surface Finish:                                          Single side polished

•   AlN MSDS

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