• The furnace consists of 16 small tube furnace modules with quartz tube 25 mm O.D. x 20 mm I.D. x 200 mm L 
• Each heating module's temperature is controlled independently up to 1100°C
• Quick seal flange, vacuum gauge, and flow meter are installed to allows heat treatment under vacuum or flowing gas
• Processing 16 samples with different temperatures at compact space 
• The furnace system consists of two units: a furnace heating modules and a power control unit
•  The furnace can rock at variable speed

• AC 220V +/- 10% , single-phase, 50/60Hz
• Maximum power 13 KW
• Note: Power cable included but without a plug. Please install a plug on your own. You may purchase a plug from your local hardware store or browse our catalog for a compatible plug

• 16 furnaces are driven by the heavy-duty motor to swing
• Rocking angle: -15º to +15º
• Rocking frequency: 50/min (25 cycles/min), 1 cycle is -15º to +15º

• Continuous Working Temperature 1000°C
• Maximum Working Temperature 1100°C (< 1 hrs)
• Temperature accuracy:   ±1 °C
• Constant temperature zone:  
• +/- 2°C within center 20 mm cubic zone
• +/- 5°C within center 55 mm cubic zone

• 16 pieces of High purity Quartz tube with 25 mm O.D. x 20 mm I.D. x 200 mm L are included
• 16 pairs of SS304 Quickly clamped flange with 1/8 gas inlet and outlet, as well as vacuum ports are built-in
• 16 pairs of needle valves are designed for gas inlet and outlet for gas flow control
• 16 vacuum ports in the back could be connected to the vacuum pump via 16 to 1 adaptor
• Only one vacuum pump required via a KF25 port. Click the picture below to choose a vacuum pump
• Max. Vacuum 10^-2 torr by a mechanical pump and 10^-5 torr by turbopump
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• 16 channel heating tube is controlled independently by 30 segments programmable temperature controller
• 16 K-type Thermal Couples
• 6" Touch screen panel to set heating programs
• RS484 port is built-ing and  software is optional for PC operation

Heating Rate

• ≤ 10°C/min    

Heating Element

• NiCrAl alloy wire

• CE Certified
• NRTL (UL61010) or CSA certification is available at an extra cost

  Warranty

Operation Instruction

 Warning &  Note

• Max pressure of this furnace is 7.5 PSI (0.5 atm).  You must install a pressure regulator on your gas tank to avoid over-pressure. Click here to learn the installation of a gas regulator
  
• This furnace also can be modified as a larger CVD furnace system with the proper gas delivery system. Please contact us to discuss your special application
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