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Four Source High Vacuum Thermal Evaporation Coater With Dual Source10-6 torr - GSL-1800X-ZF4

Four Source High Vacuum Thermal Evaporation Coater With Dual Source10-6 torr - GSL-1800X-ZF4

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GSL-1800X-ZF4 is a high-vacuum evaporation coater designed for coating oxygen-sensitive metallic materials, such as Ti, Al, Ir, etc. It also can be used for coating all kinds of materials. It has four evaporation heater sources and coats two types of materials at the same time at a high vacuum up to 10-6 torr. It is an excellent and cost-effective coating machine for research labs.
Note: Since May 2023, increase chamber size to easily load sample

SPECIFICATIONS 

Input & Output Power
  • Input: 208 - 240VAC, 20 A, 50/60 Hz, single phase
  • Total Power required: 5 KW ( including pump)
  • Output: 0 - 8VAC max. and 200A Max. (1600 W Max. )

Vacuum Chamber

 
  • Stainless steel chamber:  300mm ID. x 360 mm H, polished finish. 
  • 100 mm observation window
  • Hinged-type door for easy sample loading
  • Motorized shutters for each evaporation boat, 
  • One ISO-100K port for connection with a turbo pump and a gate valve.
  • One KF16 port to connect the vacuum gauge
  • Six CF35 ports to connect a necessary device (e.g. film thickness monitor (QCM))
Vacuum Pump ( optional)
  • 260 L/s turbo molecular pump
    • Vacuum level: 5.0x10-6 Torr ( after 40 minutes of pumping )
    • Limit vacuum: 5.0x10-7  Torr ( after baking at 100 -150°C)
    • Leaking rate: 5.0x10-7 Pa.
    • Vacuum Port: DN 100 ISO-K
  • A mechanical pump (YTP-550-LD) is required as a backing pump to initially achieve the vacuum level of <1e-2 torr

Evaporation Source
&
Sample Holder
  • Four tungsten heating boats with water-cooled shrouds
  • Tungsten heating boat, 70L x 12W x 3H (mm). 
  • Ø120 mm rotary sample holder
  • Evaporation distance from source to sample holder is 140-200 mm
  • The sample stage with a heating function (up to 500 °C) is optional upon request
In-situ thickness monitor optional
  • Quartz crystal microbalance is optional for thickness measurements
  • The accuracy of thickness control is 1.0 Angstrom.
Control Unit
  • Vacuum, thickness, and power control are integrated into one control box
  • The Control Unit is separated from the vacuum chamber for easy moving

Facility Requirement 
  • Space: 250 SF with height > 6 feet
  • Chilled Water: > 16L/minute flowing water required for electrode cooling or using a recirculating water chiller

Certificate
  • CE certified
  • NRTL or CSA certification is available upon request at the extra cost

 

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Dimension:

  • 900mm( L) X 1100mm(W) X 1800mm(H)

Net Weight:

  • 600 kg

MTI offers a Two-Year limited warranty with lifetime support(may cause a fee) for this product.

The MTI Two-Year Limited Warranty does NOT cover

  • Consumable parts such as O-rings, crucibles, screws, washers, etc.
  • Any damage and rust resulting from improper storage or maintenance.
  • Any damages caused by the use of corrosive and acidic gases.
  • Any damage resulting from failing to adhere to the individual product's specific operation requirements, such as water cooling, venting, etc.
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