GSL-1800X-ZF4 is a high-vacuum evaporation coater designed for coating oxygen-sensitive metallic materials, such as Ti, Al, Ir, etc. It also can be used for coating all kinds of materials. It has four evaporation heater sources and coats two types of materials at the same time at a high vacuum up to 10-6 torr. It is an excellent and cost-effective coating machine for research labs.
Note: Since May 2023, increase chamber size to easily load sample
SPECIFICATIONS
|
Input & Output Power
|
- Input: 208 - 240VAC, 20 A, 50/60 Hz, single phase
- Total Power required: 5 KW ( including pump)
- other 3 phase voltage is available upon request
- Output: 0 - 8VAC max. and 200A Max. (1600 W Max. )
|
|
Vacuum Chamber
|
- Stainless steel chamber: 300mm ID. x 360 mm Height, Sand-blasting electrolytic polishing surface
- 100 mm observation window in front of the chamber
- Hinged-type door for easy sample loading
- Electrically-driven shutters are on top of each evaporation W boat, which allows evaporating 4 kinds of material one by one
- One KF40 port with a gate valve to connect to DN 100 ISO-K the turbo pump directly
- One KF16 port to connect the vacuum gauge
- Six CF35 ports to connect a necessary device (e.g. film thickness monitor)
|
Vacuum Pump ( optional)
 
|
- A high-speed turbo vacuum pump is optional at extra cost (click the picture left to see specs )
- Vacuum level: 5.0x10-6 Torr ( after 40 minutes of pumping )
- Limit vacuum: 5.0x10-7 Torr ( after baking at 100 -150°C)
- Leaking rate: 5.0x10-7 Pa.
- Vacuum Port: DN 100 ISO-K
- A mechanical pump (YTP-550-LD) is better to install in series to initially achieve the vacuum level of 3E-3Torr, which is good for subsequent turbopumps to achieve the target vacuum level.
|
Evaporation Source
&
Sample Holder
|
- Four tungsten heating boats are included supported by water-cold electrodes
- The tungsten heating boat has dimensions 70L x 12W x 3H (mm). Spare W boat is available at extra cost)
- Each top of the boat has a manual operation shutter
- Built-in manual shutter allows evaporation source can be used without contamination
- 120 mm diameter rotating sample holder is on top of the chamber with a diameter of 300mm,
- The distance between the evaporation source and sample holder is 140-200 mm adjustable
- The sample stage with a heating function (up to 500 °C) is optional and is available upon request
  
|
In-situ thickness monitor optional
|
- Hi-resolution Film Thickness Monitor and Controller are optional (click the picture left to see detailed specs )
- The accuracy of thickness control is 1.0 Angstrom.
|
|
Control Unit
|
- Vacuum, thickness, and power control are integrated into one control box
- The Control Unit is separated from the vacuum chamber for easy moving
- You may place the control unit on top of the vacuum station
|
|
Facility Requirement
|
- Space: 250 SF with height > 6 feet
- Power: 208 - 240V AC, single phase with Max 10KW ( 50A breaker)
- Water: > 16L/minute flowing water required for electrode cooling. You may order recirculating water chiller to save water by clicking the picture below at extra cost.
|
|
Certificate
|
|
