GSL-1800X-ZF4 is a high-vacuum evaporation coater designed for coating oxygen-sensitive metallic materials, such as Ti, Al, Au, etc. It also can be used for coating other materials. It has four evaporation heating sources for layer by layer deposition inside a high vacuum chamber, up to 10-6 torr.
Note: Since May 2023, increase chamber size to easily load sample
SPECIFICATIONS
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Power
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- Input: 208 - 240VAC, 30 A, 50/60 Hz, single phase
- 5 KVA
- Output: 0 - 8VAC max. and 200A Max. (1600 W Max. )
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Vacuum Chamber
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- Stainless steel chamber: 300mm ID. x 360 mm H, electropolished
- 100 mm observation window
- Hinged front door for easy sample loading
- Motorized shutters for each evaporation source
- One ISO-100K port for connection with a turbo pump and a gate valve.
- One KF16 port to connect the vacuum gauge
- One KF40 port
- Six CF35 ports to connect a necessary device (e.g., film thickness monitor (QCM))
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Vacuum Pump ( optional)
 
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- 260 L/s turbo molecular pump
- Vacuum level: 5.0x10-6 Torr ( after 40 minutes of pumping if the chamber is backfilled with dry nitrogen and exposed to air in a short time)
- Ultimate vacuum: 5.0x10-7 Torr ( after bake out at 100 -150°C)
- Leaking rate: 6.7×10-8 Pa·L/S
- Vacuum Port: DN 100 ISO-K (standard), DN160 ISO-K (optional)
- A mechanical pump (YTP-550-LD) is required as a backing pump to achieve the vacuum level of <1e-2 torr initially
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Evaporation Source
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Sample Holder
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- Four tungsten heating boats with water-cooled shrouds
- Tungsten heating boat, 70L x 12W x 3H (mm).
- Ø120 mm rotary sample holder
- Evaporation distance from source to sample holder is 140-200 mm
- The sample stage with a heating function (up to 500 °C) is optional upon request
  
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Thickness measurement
(Optional)
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Control Unit
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- Vacuum, thickness, and power control are integrated into one control box
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Chilled Water
(Optional)
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- Chilled Water 30-60 psig (0.2 - 0.4 MPa), 15°C - 25 °C
- MTI recommends using a recirculating water chiller, KJ5000.
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Certificate
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