EQ-GZK-103-L is a high-speed turbo-pump station with electric gate valve, which provides the fastest pumping speed up to 700 L/s. It is an ideal tool for most of MTI's tube furnaces to achieve high vacuum > 5x 10E-7 torr (please read details in the specs)
Specifications
Mobile Cart Structure
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- Inside: turbo-pump with rotary vane pump with vacuum pressure sensors and auto shut off valve
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Power
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- 3x220VAC ± 10%, 50/60Hz
- 2.5 KW power consumption
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Pumping Speed & Vacuum Limit
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- Turbo-pump 700 L/S
- Vacuum pressure: 10E-7 Torr without connecting to any chamber
- Mechanical pump: 800 L/min
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Flange Size
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- CF160 from turbo-pump
- KF 40 for connecting to the outside vacuum chamber
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Working Range
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- From 750 Torr to < 5.0 E-7 Torr with the proper connection at room temperature. The 5.0 E-6 torr can be achieved with MTI 8" - 15" O.D tube furnace.
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Weight
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Dimensions
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Dimensions: 1000 X600 X 1550mm
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Warranty |
One year manufacturer warranty.(Attention: Improper use will cause all claims for liability and warranties to be forfeited. Improper use is deemed as below:
- Pumping of corrosive or explosive media.
- Pumping of condensing vapors.
- Pumping of liquids.
- Pumping of dust.
- Operation with improper high levels of insulated heat input.
- Operation in potentially explosive areas.)
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Compliance |
- CE Certified
- NRTL certification is available upon request.
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