OTF-1200X-PEC4LV is acompact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 300W RF plasma source, 2" or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high-quality mechanical pump. The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nanowire from a gas state (vapor) to a solid-state, and benefits:
- Lower temperature processing compared to conventional CVD.
- Film stress can be controlled by high/low frequency mixing techniques.
- Control over stoichiometry via process conditions.
- Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.
Specifications
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Split Tube furnace
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1200oC Max. working temperature for < 60 minutes
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1100oC Max for continuous heating
- 30 segments programmable precision digital temperature controller
- 440 mm length single heating zone and 150 mm length constant temperate zone
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High purity quartz tube optional from ( click the optional bar to choose )
One pair of the vacuum-sealed flange with valves
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Input power: 208 – 240V AC input, a single phase at max. 4KW
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- Output Power: 5 -300W adjustable with ± 1% stability
- RF frequency: 13.56 MHz ±0.005% stability
- Reflection Power: 200W max.
- Matching: Automatic
- RF Output Port: 50 Ω, N-type, female
- Noise: <50 dB.
- Cooling: Air cooling.
- Power: 208-240VAC, 50/60Hz
- Note: This RF power supply can accept 50 - 80 mm Max. quartz tube by changing flange
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Anti-corrosive Pressure Gauge
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- 3.8x10-5 to 1125 Torr measurement range
- Anti-corrosive, gas-type independent
- High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
- Fast atmospheric detection eliminates waiting time and shortens the process cycle
- Easy to exchange plug & play sensor element
- Click the picture to view detailed spec
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Vacuum Pump and valve
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- Heavy-Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two-Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 torr.
- KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve
- Digital vacuum pressure gauge and display are installed with the furnace
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Optional Oilless Pump
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Please order the oilless pump for zero contamination:
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Mass Flowmeter
 
EQ-GSL-LCD
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- 4-channeled Gas Mixing
- Made of 316 stainless steel valve
- Gas mixing tank: Φ80X120mm
- 600mm(L) x 745mm(W) x 700mm(H)
- 6" color touch screen control panel to make parameter setting at easy.
- Touchscreen Control and PC remote switchable.
- 23W per channel
- AC 220V/50Hz Single phase
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| Temperature Controller |
- MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
- Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
- Over-temperature protection and alarm allow for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
- RS485 Communications Port.
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Optional
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Overall dimensions
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- Furnace: 550mm(L) x 380mm(W) x 520mm(H)
- 3 Bottom Mobile case together: 1800mm(L) x 850mm(W) x 700mm(H)
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Warranty
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One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.) |
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Laptop, software & WiFi Control (Optional)
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- Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
- Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profiles, manage heat-treatment recipes, record and plot data for MTI furnaces.
 
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Compliance
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- CE Certified
- NRTL or CSA certification is available upon request at extra cost.
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click here to choose a crucible