• Double-layer steel casing with air cooling to keep furnace surface temperature lower than 60°C.  
• High-purity fibrous alumina insulation for Max. Energy-saving.
• The special refractory coating on the inner increases furnace life.
• Two pairs of fibrous ceramic tube blocks are included for blocking heat radiation from inside the tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating)
• Split cover with Interlock protection, cut the power if the door opens during furnace heating process.
  

• Max. heating temperature: 1500°C  (< 1hr  ) 
• Continuously heating temperature: 1400°C
• Heating rate: 10°C /min Max. And  cooling rate < 10 °C /min Max. for mullite tube 
• Note: if using alumina tube: Heating rate: 10°C /min Max. and cooling rate < 5 °C /min Max.
• The S-Type thermal couple included
• 16 pcs SiC rod as heating elements  (1500 grade )  Pls click pic left to order spare or replacement
• NoticeCustomer will install SiC rod on-site by themselves as instruction manual due to they are easy to damage during shipping.
• Please notice, For the SIC heating element, it is a consumable part, and not covered by warranty, and usually, its service life is one year.

• Total heating zone length: 390mm
• Constant temperature zone: 150 mm (+/-2°C( click Pic below for temp. Profile )
• 

• FA-YD518P-AG temperature controller included.
• Proportional–integral–derivative control (PID control) and auto-tune function
• 30 segments programmed with ramping, cooling, and dwelling steps
• Built-in over-temperature alarm and thermocouple failure alarm
• +/- 1 ºC temperature control accuracy
• Default DB9 / PC communication port

• One pair of stainless steel vacuum flange is included in the package.
• Two pairs of fibrous ceramic tube blocks are included for blocking heat radiation from the inside tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating)
• For a fast & better vacuum, suggest you use stainless steel pipe ( click to order at extra cost ) 

                

• Standard mechanical vacuum gauge measures within a pressure range of -0.1 to 0.15Mpa.
  
• OPTIONAL: A gas-type independent (above 10 mbar) digital vacuum gauge with a wide range between 3.8x10^-5 to 1125 Torr. Aside from greater measurement precision, this gauge reduces the risks of chamber explosions caused by the incorrect reading of gas pressures due to gas-type dependency.

• Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial)
• Labview-Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profiles, manage heat-treatment recipes, and record and plot data for MTI furnaces.

• CE Certified
• NRTL(UL61010) or CSA certification is available at extra cost. 

• Please click here to see our typical temperature profile calibration result at various temperatures.
• How to set up a ceramic tube and vacuum flange for MTI Tube furnace
• Proper placement of tube blocks
• The furnace can grow 3C-SiC film on Si; please read the below article to see the procedure

• The tube furnaces with mullite tubes are designed for use under vacuum and low pressure < 0.02 Mpa. 
• Attention: A pressure regulator must be installed on your input gas tank
• Never heat the furnace while the gas release valve is closed and a positive pressure condition exists within the furnace chamber. The pressure gauge must be used to closely monitor the chamber condition at all times during the heating process; please open the gas release valve immediately once the chamber pressure has reached over 3 PSI to prevent unforeseeable damages.
• The flow rate for gasses should be limited to < 200 SCCM ( or 200ml/min )
•  Vacuum pressures may only be safely used up to 1300°C

• Performance degradation (i.e. furnace can not reach the maximum temperature of 1500°C, or it is drawing a higher than normal working current) can be expected due to the use of aged SiC heating elements. It is necessary to replace all the heating elements if the above symptoms were seen. Please order the replacements from the standard package list below.

Description

Qty

OTF-1500X-UL-2

OTF-1500X-UL-3

1

Alumina Foam Block for tube furnace

1 pair

EQ-F-T-block-42

EQ-F-T-block-65

2

Vacuum flanges

1 pair

EQ-FL-50

EQ-FL-76

3

alumina tubing

1 unit

EQ-TA-50D-M1000

EQ-TA-76D-M1000